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A Fullerene derivative as an electron beam resist for nanolithography

A. P. G. Robinson, R. E. Palmer, T. Tada, T. Kanayama, J. A. Preece, Richard Palmer Orcid Logo

Applied Physics Letters, Volume: 72, Issue: 11, Pages: 1302 - 1304

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1063/1.120978

Published in: Applied Physics Letters
ISSN: 0003-6951 1077-3118
Published: 1998
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URI: https://cronfa.swan.ac.uk/Record/cronfa49480
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last_indexed 2019-03-18T20:02:01Z
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spelling 2019-03-18T14:37:27.7858605 v2 49480 2019-03-18 A Fullerene derivative as an electron beam resist for nanolithography 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Applied Physics Letters 72 11 1302 1304 0003-6951 1077-3118 31 12 1998 1998-12-31 10.1063/1.120978 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:37:27.7858605 2019-03-18T14:37:27.5518562 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering A. P. G. Robinson 1 R. E. Palmer 2 T. Tada 3 T. Kanayama 4 J. A. Preece 5 Richard Palmer 0000-0001-8728-8083 6
title A Fullerene derivative as an electron beam resist for nanolithography
spellingShingle A Fullerene derivative as an electron beam resist for nanolithography
Richard Palmer
title_short A Fullerene derivative as an electron beam resist for nanolithography
title_full A Fullerene derivative as an electron beam resist for nanolithography
title_fullStr A Fullerene derivative as an electron beam resist for nanolithography
title_full_unstemmed A Fullerene derivative as an electron beam resist for nanolithography
title_sort A Fullerene derivative as an electron beam resist for nanolithography
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 A. P. G. Robinson
R. E. Palmer
T. Tada
T. Kanayama
J. A. Preece
Richard Palmer
format Journal article
container_title Applied Physics Letters
container_volume 72
container_issue 11
container_start_page 1302
publishDate 1998
institution Swansea University
issn 0003-6951
1077-3118
doi_str_mv 10.1063/1.120978
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 1998-12-31T04:00:32Z
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score 11.013619

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