Nonlinear dynamics of in-plane ring resonator for mass sensing

Azizishirvanshahi, Saber Azizi; Madinei, Hadi; Khodaparast, Hamed Haddad; Steeneken, Peter; Younis, Mohammad I.; Rezazadeh, Ghader

doi:10.1007/s00542-025-05960-8

Journal article 177 views 18 downloads

Nonlinear dynamics of in-plane ring resonator for mass sensing

Saber Azizi Azizishirvanshahi, Hadi Madinei

, Hamed Haddad Khodaparast

, Peter Steeneken, Mohammad I. Younis, Ghader Rezazadeh

Microsystem Technologies

Swansea University Authors: Saber Azizi Azizishirvanshahi, Hadi Madinei , Hamed Haddad Khodaparast

PDF | Version of Record

© The Author(s) 2025. This article is licensed under a Creative Commons Attribution 4.0 International License.
Download (4.69MB)

Check full text

DOI (Published version): 10.1007/s00542-025-05960-8

Abstract

Mass sensing using MEMS is crucial for detecting minute changes in mass with high sensitivity, enabling applications in environmental monitoring, medical diagnostics, and chemical detection. However, fluid damping in these environments is relatively high and can lead to reduction of the quality fact...

Full description

Published in:	Microsystem Technologies
ISSN:	0946-7076 1432-1858
Published:	Springer Nature 2025
Online Access:	Check full text
URI:	https://cronfa.swan.ac.uk/Record/cronfa70643

first_indexed	2025-10-13T08:55:08Z
last_indexed	2025-11-07T07:35:01Z
id	cronfa70643
recordtype	SURis
fullrecord	<?xml version="1.0"?><rfc1807><datestamp>2025-11-06T13:53:43.8005214</datestamp><bib-version>v2</bib-version><id>70643</id><entry>2025-10-13</entry><title>Nonlinear dynamics of in-plane ring resonator for mass sensing</title><swanseaauthors><author><sid>d69732e7f5a3b101651f3654bf7175d0</sid><firstname>Saber Azizi</firstname><surname>Azizishirvanshahi</surname><name>Saber Azizi Azizishirvanshahi</name><active>true</active><ethesisStudent>false</ethesisStudent></author><author><sid>d9a10856ae9e6a71793eab2365cff8b6</sid><ORCID>0000-0002-3401-1467</ORCID><firstname>Hadi</firstname><surname>Madinei</surname><name>Hadi Madinei</name><active>true</active><ethesisStudent>false</ethesisStudent></author><author><sid>f207b17edda9c4c3ea074cbb7555efc1</sid><ORCID>0000-0002-3721-4980</ORCID><firstname>Hamed</firstname><surname>Haddad Khodaparast</surname><name>Hamed Haddad Khodaparast</name><active>true</active><ethesisStudent>false</ethesisStudent></author></swanseaauthors><date>2025-10-13</date><deptcode>ACEM</deptcode><abstract>Mass sensing using MEMS is crucial for detecting minute changes in mass with high sensitivity, enabling applications in environmental monitoring, medical diagnostics, and chemical detection. However, fluid damping in these environments is relatively high and can lead to reduction of the quality factor and sensitivity of these sensors. In this paper, we present a rotating ring resonator for mass sensing applications and investigate its nonlinear dynamics and bifurcation. The ring is supported by four slender beams and subjected to rotational base excitation. The shift in the nonlinear bifurcation point on the frequency response curve is used for mass sensing, which is significant because the device exhibits multiple nonlinear bifurcation points. The structure is designed and modelled to vibrate in a rotational in-plane mode, to provide lower damping and higher quality factor compared to cantilever-based mass sensors that operate in a translational out-of-plane mode. Moreover, the structure exhibits nonlinear resonance zones within the super harmonic regime, enabling mass detection at a particular fraction of the primary resonance zone. At lower excitation amplitudes, the linear response dominates, and the device also allows mass detection in the linear regime via resonance frequency shifts.</abstract><type>Journal Article</type><journal>Microsystem Technologies</journal><volume>0</volume><journalNumber/><paginationStart/><paginationEnd/><publisher>Springer Nature</publisher><placeOfPublication/><isbnPrint/><isbnElectronic/><issnPrint>0946-7076</issnPrint><issnElectronic>1432-1858</issnElectronic><keywords/><publishedDay>21</publishedDay><publishedMonth>10</publishedMonth><publishedYear>2025</publishedYear><publishedDate>2025-10-21</publishedDate><doi>10.1007/s00542-025-05960-8</doi><url>https://doi.org/10.1007/s00542-025-05960-8</url><notes>Technical Paper</notes><college>COLLEGE NANME</college><department>Aerospace, Civil, Electrical, and Mechanical Engineering</department><CollegeCode>COLLEGE CODE</CollegeCode><DepartmentCode>ACEM</DepartmentCode><institution>Swansea University</institution><apcterm>SU Library paid the OA fee (TA Institutional Deal)</apcterm><funders>This work was supported by Engineering and Physical Sciences Research Council, EP/Y027914/1.</funders><projectreference/><lastEdited>2025-11-06T13:53:43.8005214</lastEdited><Created>2025-10-13T09:51:05.0763624</Created><path><level id="1">Faculty of Science and Engineering</level><level id="2">School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Aerospace Engineering</level></path><authors><author><firstname>Saber Azizi</firstname><surname>Azizishirvanshahi</surname><order>1</order></author><author><firstname>Hadi</firstname><surname>Madinei</surname><orcid>0000-0002-3401-1467</orcid><order>2</order></author><author><firstname>Hamed</firstname><surname>Haddad Khodaparast</surname><orcid>0000-0002-3721-4980</orcid><order>3</order></author><author><firstname>Peter</firstname><surname>Steeneken</surname><order>4</order></author><author><firstname>Mohammad I.</firstname><surname>Younis</surname><order>5</order></author><author><firstname>Ghader</firstname><surname>Rezazadeh</surname><order>6</order></author></authors><documents><document><filename>70643__35571__b50e858a54624586a2b2b61cbc81bcae.pdf</filename><originalFilename>70643.VOR.pdf</originalFilename><uploaded>2025-11-06T13:51:40.2862711</uploaded><type>Output</type><contentLength>4923025</contentLength><contentType>application/pdf</contentType><version>Version of Record</version><cronfaStatus>true</cronfaStatus><documentNotes>© The Author(s) 2025. This article is licensed under a Creative Commons Attribution 4.0 International License.</documentNotes><copyrightCorrect>true</copyrightCorrect><language>eng</language><licence>http://creativecommons.org/licenses/by/4.0/</licence></document></documents><OutputDurs/></rfc1807>
spelling	2025-11-06T13:53:43.8005214 v2 70643 2025-10-13 Nonlinear dynamics of in-plane ring resonator for mass sensing d69732e7f5a3b101651f3654bf7175d0 Saber Azizi Azizishirvanshahi Saber Azizi Azizishirvanshahi true false d9a10856ae9e6a71793eab2365cff8b6 0000-0002-3401-1467 Hadi Madinei Hadi Madinei true false f207b17edda9c4c3ea074cbb7555efc1 0000-0002-3721-4980 Hamed Haddad Khodaparast Hamed Haddad Khodaparast true false 2025-10-13 ACEM Mass sensing using MEMS is crucial for detecting minute changes in mass with high sensitivity, enabling applications in environmental monitoring, medical diagnostics, and chemical detection. However, fluid damping in these environments is relatively high and can lead to reduction of the quality factor and sensitivity of these sensors. In this paper, we present a rotating ring resonator for mass sensing applications and investigate its nonlinear dynamics and bifurcation. The ring is supported by four slender beams and subjected to rotational base excitation. The shift in the nonlinear bifurcation point on the frequency response curve is used for mass sensing, which is significant because the device exhibits multiple nonlinear bifurcation points. The structure is designed and modelled to vibrate in a rotational in-plane mode, to provide lower damping and higher quality factor compared to cantilever-based mass sensors that operate in a translational out-of-plane mode. Moreover, the structure exhibits nonlinear resonance zones within the super harmonic regime, enabling mass detection at a particular fraction of the primary resonance zone. At lower excitation amplitudes, the linear response dominates, and the device also allows mass detection in the linear regime via resonance frequency shifts. Journal Article Microsystem Technologies 0 Springer Nature 0946-7076 1432-1858 21 10 2025 2025-10-21 10.1007/s00542-025-05960-8 https://doi.org/10.1007/s00542-025-05960-8 Technical Paper COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University SU Library paid the OA fee (TA Institutional Deal) This work was supported by Engineering and Physical Sciences Research Council, EP/Y027914/1. 2025-11-06T13:53:43.8005214 2025-10-13T09:51:05.0763624 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Aerospace Engineering Saber Azizi Azizishirvanshahi 1 Hadi Madinei 0000-0002-3401-1467 2 Hamed Haddad Khodaparast 0000-0002-3721-4980 3 Peter Steeneken 4 Mohammad I. Younis 5 Ghader Rezazadeh 6 70643__35571__b50e858a54624586a2b2b61cbc81bcae.pdf 70643.VOR.pdf 2025-11-06T13:51:40.2862711 Output 4923025 application/pdf Version of Record true © The Author(s) 2025. This article is licensed under a Creative Commons Attribution 4.0 International License. true eng http://creativecommons.org/licenses/by/4.0/
title	Nonlinear dynamics of in-plane ring resonator for mass sensing
spellingShingle	Nonlinear dynamics of in-plane ring resonator for mass sensing Saber Azizi Azizishirvanshahi Hadi Madinei Hamed Haddad Khodaparast
title_short	Nonlinear dynamics of in-plane ring resonator for mass sensing
title_full	Nonlinear dynamics of in-plane ring resonator for mass sensing
title_fullStr	Nonlinear dynamics of in-plane ring resonator for mass sensing
title_full_unstemmed	Nonlinear dynamics of in-plane ring resonator for mass sensing
title_sort	Nonlinear dynamics of in-plane ring resonator for mass sensing
author_id_str_mv	d69732e7f5a3b101651f3654bf7175d0 d9a10856ae9e6a71793eab2365cff8b6 f207b17edda9c4c3ea074cbb7555efc1
author_id_fullname_str_mv	d69732e7f5a3b101651f3654bf7175d0_*_Saber Azizi Azizishirvanshahi d9a10856ae9e6a71793eab2365cff8b6__Hadi Madinei f207b17edda9c4c3ea074cbb7555efc1_**_Hamed Haddad Khodaparast
author	Saber Azizi Azizishirvanshahi Hadi Madinei Hamed Haddad Khodaparast
author2	Saber Azizi Azizishirvanshahi Hadi Madinei Hamed Haddad Khodaparast Peter Steeneken Mohammad I. Younis Ghader Rezazadeh
format	Journal article
container_title	Microsystem Technologies
container_volume	0
publishDate	2025
institution	Swansea University
issn	0946-7076 1432-1858
doi_str_mv	10.1007/s00542-025-05960-8
publisher	Springer Nature
college_str	Faculty of Science and Engineering
hierarchytype
hierarchy_top_id	facultyofscienceandengineering
hierarchy_top_title	Faculty of Science and Engineering
hierarchy_parent_id	facultyofscienceandengineering
hierarchy_parent_title	Faculty of Science and Engineering
department_str	School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Aerospace Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Aerospace Engineering
url	https://doi.org/10.1007/s00542-025-05960-8
document_store_str	1
active_str	0
description	Mass sensing using MEMS is crucial for detecting minute changes in mass with high sensitivity, enabling applications in environmental monitoring, medical diagnostics, and chemical detection. However, fluid damping in these environments is relatively high and can lead to reduction of the quality factor and sensitivity of these sensors. In this paper, we present a rotating ring resonator for mass sensing applications and investigate its nonlinear dynamics and bifurcation. The ring is supported by four slender beams and subjected to rotational base excitation. The shift in the nonlinear bifurcation point on the frequency response curve is used for mass sensing, which is significant because the device exhibits multiple nonlinear bifurcation points. The structure is designed and modelled to vibrate in a rotational in-plane mode, to provide lower damping and higher quality factor compared to cantilever-based mass sensors that operate in a translational out-of-plane mode. Moreover, the structure exhibits nonlinear resonance zones within the super harmonic regime, enabling mass detection at a particular fraction of the primary resonance zone. At lower excitation amplitudes, the linear response dominates, and the device also allows mass detection in the linear regime via resonance frequency shifts.
published_date	2025-10-21T05:31:19Z
_version_	1851098063085502464
score	11.089386

Nonlinear dynamics of in-plane ring resonator for mass sensing

Similar Items