Journal article 82 views
Enhanced Super-harmonic Resonance in Piezoelectrically Laminated Curved Microbeam Resonators Under Fringing-Field Electrostatic Actuation
Zahra Rashidi,
Saber Azizi Azizishirvanshahi,
Omid Rahmani
European Journal of Mechanics - A/Solids, Start page: 105941
Swansea University Author: Saber Azizi Azizishirvanshahi
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DOI (Published version): 10.1016/j.euromechsol.2025.105941
Abstract
Achieving low-frequency MEMS resonators while maintaining the compact size of MEMS sensors has long been a challenge in MEMS design and fabrication. This study focuses on the super-harmonic resonance regions and associated bifurcation points of a curved microbeam sandwiched between two piezoelectric...
| Published in: | European Journal of Mechanics - A/Solids |
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| ISSN: | 0997-7538 1873-7285 |
| Published: |
Elsevier BV
2025
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| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa70839 |
| Abstract: |
Achieving low-frequency MEMS resonators while maintaining the compact size of MEMS sensors has long been a challenge in MEMS design and fabrication. This study focuses on the super-harmonic resonance regions and associated bifurcation points of a curved microbeam sandwiched between two piezoelectric layers and subjected to fringing-field electrostatic actuation. The nonlinear equations of motion are derived, and the dependence of the electrostatic force on displacement is analysed using a finite element approach. The microbeam is excited by a combination of DC and AC electrostatic actuation, along with a tuning DC piezoelectric voltage. The influence of the piezoelectric voltage on the variation of the natural frequency under a given DC electrostatic excitation is examined. The frequency response curves are obtained over a broad excitation range, extending from below the primary resonance, through the super-harmonic regime, and beyond the primary resonance region. Bifurcation points are identified using Floquet multipliers. The results indicate that strong quadratic and cubic nonlinearities lead to the emergence of super-harmonic resonance zones of orders 1/2 and 1/3 in the frequency response, enabling the development of low-frequency resonators while retaining the advantages of MEMS-scale sensors. This effect is particularly significant in the design of MEMS energy harvesters, facilitating energy extraction from low-frequency mechanical noise. The simultaneous presence of nonlinearities of orders 1/2 and 1/3 and even higher orders generates multiple resonance zones within the super-harmonic regime, enabling the design of broadband low-frequency energy harvesters and MEMS wide-bandpass filters. |
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| Keywords: |
Nonlinear Dynamics; Super-harmonic secondary resonance; Low-frequency MEMS resonators; Wide-band; Initially curved microbeam; Fringing-field electrostatic actuation; Piezoelectric actuation |
| College: |
Faculty of Science and Engineering |
| Funders: |
Swansea University |
| Start Page: |
105941 |