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Compositional Mapping of the AlGaN Alloy Composition in Graded Buffer Structures Using Cathodoluminescence

Kagiso Loeto Orcid Logo, Gunnar Kusch, Saptarsi Ghosh Orcid Logo, Martin Frentrup, Alexander Hinz, Rachel Oliver

physica status solidi (a), Volume: 220, Issue: 16

Swansea University Author: Saptarsi Ghosh Orcid Logo

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DOI (Published version): 10.1002/pssa.202200830

Abstract

Herein, the use of cathodoluminescence (CL) hyperspectral mapping in the quantification of the AlGaN alloy composition in graded buffer structures is explored. The quantification takes advantage of the known parabolic dependence of the AlGaN bandgap on the alloy composition allowing the AlGaN near-b...

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Published in: physica status solidi (a)
ISSN: 1862-6300 1862-6319
Published: Wiley 2023
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URI: https://cronfa.swan.ac.uk/Record/cronfa66870
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spelling 2024-08-15T12:02:35.9233213 v2 66870 2024-06-23 Compositional Mapping of the AlGaN Alloy Composition in Graded Buffer Structures Using Cathodoluminescence 3e247ecabd6eddd319264d066b0ce959 0000-0003-1685-6228 Saptarsi Ghosh Saptarsi Ghosh true false 2024-06-23 ACEM Herein, the use of cathodoluminescence (CL) hyperspectral mapping in the quantification of the AlGaN alloy composition in graded buffer structures is explored. The quantification takes advantage of the known parabolic dependence of the AlGaN bandgap on the alloy composition allowing the AlGaN near-band-edge (NBE) emission energy recorded from CL to be converted to a composition. The proposed quantification method is first applied to cleaved cross-sections of two nominally step-graded AlGaN buffer structures each containing five AlGaN layers with different compositions. By comparing the compositions obtained from CL to those calculated using X-ray diffraction, a close agreement between values from both techniques is observed. However, due to a change in the bowing parameter, some deviation is observed for layers with compositions near 75%. The method is then applied to cleaved cross-sections of an AlGaN buffer whose group III precursor flow molar ratio is varied linearly throughout the growth. Herein, the hyperspectral nature of the CL datasets is exploited such as to produce composition maps by converting the relevant AlGaN-NBE emission energy at each pixel of the CL data to a composition. Journal Article physica status solidi (a) 220 16 Wiley 1862-6300 1862-6319 AlGaN buffer structures; cathodoluminescence; high-electron-mobility transistors; III-nitrides 1 8 2023 2023-08-01 10.1002/pssa.202200830 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University Engineering and Physical Sciences Research Council. Grant Numbers: EP/N017927/1, EP/S022953/1, EP/N014820/2 Deutsche Forschungsgemeinschaft. Grant Number: HI 2141/1-1 2024-08-15T12:02:35.9233213 2024-06-23T19:54:10.3256997 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering Kagiso Loeto 0000-0002-1694-2102 1 Gunnar Kusch 2 Saptarsi Ghosh 0000-0003-1685-6228 3 Martin Frentrup 4 Alexander Hinz 5 Rachel Oliver 6 66870__31124__1fff9610041245c1918467bdd8285dd1.pdf 66870.VoR.pdf 2024-08-15T12:00:24.4178723 Output 4927740 application/pdf Version of Record true © 2023 The Authors. This is an open access article under the terms of the Creative Commons Attribution License. true eng http://creativecommons.org/licenses/by/4.0/
title Compositional Mapping of the AlGaN Alloy Composition in Graded Buffer Structures Using Cathodoluminescence
spellingShingle Compositional Mapping of the AlGaN Alloy Composition in Graded Buffer Structures Using Cathodoluminescence
Saptarsi Ghosh
title_short Compositional Mapping of the AlGaN Alloy Composition in Graded Buffer Structures Using Cathodoluminescence
title_full Compositional Mapping of the AlGaN Alloy Composition in Graded Buffer Structures Using Cathodoluminescence
title_fullStr Compositional Mapping of the AlGaN Alloy Composition in Graded Buffer Structures Using Cathodoluminescence
title_full_unstemmed Compositional Mapping of the AlGaN Alloy Composition in Graded Buffer Structures Using Cathodoluminescence
title_sort Compositional Mapping of the AlGaN Alloy Composition in Graded Buffer Structures Using Cathodoluminescence
author_id_str_mv 3e247ecabd6eddd319264d066b0ce959
author_id_fullname_str_mv 3e247ecabd6eddd319264d066b0ce959_***_Saptarsi Ghosh
author Saptarsi Ghosh
author2 Kagiso Loeto
Gunnar Kusch
Saptarsi Ghosh
Martin Frentrup
Alexander Hinz
Rachel Oliver
format Journal article
container_title physica status solidi (a)
container_volume 220
container_issue 16
publishDate 2023
institution Swansea University
issn 1862-6300
1862-6319
doi_str_mv 10.1002/pssa.202200830
publisher Wiley
college_str Faculty of Science and Engineering
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hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering
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description Herein, the use of cathodoluminescence (CL) hyperspectral mapping in the quantification of the AlGaN alloy composition in graded buffer structures is explored. The quantification takes advantage of the known parabolic dependence of the AlGaN bandgap on the alloy composition allowing the AlGaN near-band-edge (NBE) emission energy recorded from CL to be converted to a composition. The proposed quantification method is first applied to cleaved cross-sections of two nominally step-graded AlGaN buffer structures each containing five AlGaN layers with different compositions. By comparing the compositions obtained from CL to those calculated using X-ray diffraction, a close agreement between values from both techniques is observed. However, due to a change in the bowing parameter, some deviation is observed for layers with compositions near 75%. The method is then applied to cleaved cross-sections of an AlGaN buffer whose group III precursor flow molar ratio is varied linearly throughout the growth. Herein, the hyperspectral nature of the CL datasets is exploited such as to produce composition maps by converting the relevant AlGaN-NBE emission energy at each pixel of the CL data to a composition.
published_date 2023-08-01T05:32:36Z
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