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Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si Substrates

Fan Li, Song Qiu, Mike Jennings Orcid Logo, Phil Mawby

Materials Science Forum, Volume: 1004, Pages: 659 - 664

Swansea University Author: Mike Jennings Orcid Logo

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DOI (Published version): 10.4028/www.scientific.net/msf.1004.659

Published in: Materials Science Forum
ISSN: 1662-9752
Published: Trans Tech Publications, Ltd. 2020
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URI: https://cronfa.swan.ac.uk/Record/cronfa57466
first_indexed 2021-07-28T12:37:28Z
last_indexed 2021-07-29T03:17:08Z
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spelling 2021-07-28T15:28:02.4923189 v2 57466 2021-07-28 Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si Substrates e0ba5d7ece08cd70c9f8f8683996454a 0000-0003-3270-0805 Mike Jennings Mike Jennings true false 2021-07-28 ACEM Journal Article Materials Science Forum 1004 659 664 Trans Tech Publications, Ltd. 1662-9752 3C-SiC, MOS capacitors, reliability, dielectric breakdown 28 7 2020 2020-07-28 10.4028/www.scientific.net/msf.1004.659 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2021-07-28T15:28:02.4923189 2021-07-28T13:07:42.3464180 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering Fan Li 1 Song Qiu 2 Mike Jennings 0000-0003-3270-0805 3 Phil Mawby 4
title Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si Substrates
spellingShingle Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si Substrates
Mike Jennings
title_short Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si Substrates
title_full Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si Substrates
title_fullStr Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si Substrates
title_full_unstemmed Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si Substrates
title_sort Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si Substrates
author_id_str_mv e0ba5d7ece08cd70c9f8f8683996454a
author_id_fullname_str_mv e0ba5d7ece08cd70c9f8f8683996454a_***_Mike Jennings
author Mike Jennings
author2 Fan Li
Song Qiu
Mike Jennings
Phil Mawby
format Journal article
container_title Materials Science Forum
container_volume 1004
container_start_page 659
publishDate 2020
institution Swansea University
issn 1662-9752
doi_str_mv 10.4028/www.scientific.net/msf.1004.659
publisher Trans Tech Publications, Ltd.
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering
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active_str 0
published_date 2020-07-28T08:03:32Z
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