Journal article 886 views
Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si Substrates
Fan Li,
Song Qiu,
Mike Jennings 
,
Phil Mawby
,
Phil Mawby
Materials Science Forum, Volume: 1004, Pages: 659 - 664
Swansea University Author:
Mike Jennings
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.4028/www.scientific.net/msf.1004.659
Abstract
Reliability Study of MOS Capacitors Fabricated on 3C-SiC/Si Substrates
| Published in: | Materials Science Forum |
|---|---|
| ISSN: | 1662-9752 |
| Published: |
Trans Tech Publications, Ltd.
2020
|
| Online Access: |
Check full text
|
| URI: | https://cronfa.swan.ac.uk/Record/cronfa57466 |
| Keywords: |
3C-SiC, MOS capacitors, reliability, dielectric breakdown |
|---|---|
| College: |
Faculty of Science and Engineering |
| Start Page: |
659 |
| End Page: |
664 |