Conference Paper/Proceeding/Abstract 727 views 300 downloads
Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition
2019 International Semiconductor Conference (CAS)
Swansea University Authors: Khue Tian Lai , Nafiseh Badiei, Shuo Deng, Petar Igic , Lijie Li
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DOI (Published version): 10.1109/smicnd.2019.8923753
Abstract
Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition
Published in: | 2019 International Semiconductor Conference (CAS) |
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ISBN: | 9781728118864 9781728118888 |
ISSN: | 1545-827X 2377-0678 |
Published: |
IEEE
2020
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Online Access: |
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URI: | https://cronfa.swan.ac.uk/Record/cronfa53281 |
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2020-10-19T16:03:15.2230497 v2 53281 2020-01-16 Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition 0a2e83291ebd740b2b96e06cf066020c 0000-0003-3410-8178 Khue Tian Lai Khue Tian Lai true false c82cd1b82759801ab0045cb9f0047b06 Nafiseh Badiei Nafiseh Badiei true false 037acf91509a82a0855c555d3cfe00ae Shuo Deng Shuo Deng true false e085acc259a367abc89338346a150186 0000-0001-8150-8815 Petar Igic Petar Igic true false ed2c658b77679a28e4c1dcf95af06bd6 0000-0003-4630-7692 Lijie Li Lijie Li true false 2020-01-16 Conference Paper/Proceeding/Abstract 2019 International Semiconductor Conference (CAS) IEEE 9781728118864 9781728118888 1545-827X 2377-0678 density functional theory; gallium oxide; optical properties; physical vapor deposition; wide band gap semiconductors 6 1 2020 2020-01-06 10.1109/smicnd.2019.8923753 COLLEGE NANME COLLEGE CODE Swansea University 2020-10-19T16:03:15.2230497 2020-01-16T08:31:45.3594713 Faculty of Science and Engineering School of Engineering and Applied Sciences - Uncategorised Khue Tian Lai 0000-0003-3410-8178 1 Nafiseh Badiei 2 Shuo Deng 3 Petar Igic 0000-0001-8150-8815 4 Lijie Li 0000-0003-4630-7692 5 53281__16585__b00eb7c6af3944a0941adb57842ea0de.pdf CAS2019_Swansea_KTL[5421]_final.pdf 2020-02-17T10:41:15.9454928 Output 1152342 application/pdf Accepted Manuscript true true eng |
title |
Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition |
spellingShingle |
Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition Khue Tian Lai Nafiseh Badiei Shuo Deng Petar Igic Lijie Li |
title_short |
Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition |
title_full |
Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition |
title_fullStr |
Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition |
title_full_unstemmed |
Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition |
title_sort |
Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition |
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0a2e83291ebd740b2b96e06cf066020c c82cd1b82759801ab0045cb9f0047b06 037acf91509a82a0855c555d3cfe00ae e085acc259a367abc89338346a150186 ed2c658b77679a28e4c1dcf95af06bd6 |
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0a2e83291ebd740b2b96e06cf066020c_***_Khue Tian Lai c82cd1b82759801ab0045cb9f0047b06_***_Nafiseh Badiei 037acf91509a82a0855c555d3cfe00ae_***_Shuo Deng e085acc259a367abc89338346a150186_***_Petar Igic ed2c658b77679a28e4c1dcf95af06bd6_***_Lijie Li |
author |
Khue Tian Lai Nafiseh Badiei Shuo Deng Petar Igic Lijie Li |
author2 |
Khue Tian Lai Nafiseh Badiei Shuo Deng Petar Igic Lijie Li |
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Conference Paper/Proceeding/Abstract |
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2019 International Semiconductor Conference (CAS) |
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2020 |
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Swansea University |
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9781728118864 9781728118888 |
issn |
1545-827X 2377-0678 |
doi_str_mv |
10.1109/smicnd.2019.8923753 |
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IEEE |
college_str |
Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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School of Engineering and Applied Sciences - Uncategorised{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Engineering and Applied Sciences - Uncategorised |
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2020-01-06T02:06:45Z |
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11.04748 |