Conference Paper/Proceeding/Abstract 589 views 274 downloads
Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition
Khue Tian Lai 
,
Nafiseh Badiei,
Shuo Deng,
Petar Igic ,
Lijie Li
,
Nafiseh Badiei,
Shuo Deng,
Petar Igic ,
Lijie Li
2019 International Semiconductor Conference (CAS)
Swansea University Authors:
Khue Tian Lai , Nafiseh Badiei, Shuo Deng, Petar Igic , Lijie Li
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DOI (Published version): 10.1109/smicnd.2019.8923753
Abstract
Experimental and Theoretical Validation of Ga2O3 Thin Films Deposited by Physical Vapor Deposition
| Published in: | 2019 International Semiconductor Conference (CAS) |
|---|---|
| ISBN: | 9781728118864 9781728118888 |
| ISSN: | 1545-827X 2377-0678 |
| Published: |
IEEE
2020
|
| Online Access: |
Check full text
|
| URI: | https://cronfa.swan.ac.uk/Record/cronfa53281 |
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| Keywords: |
density functional theory; gallium oxide; optical properties; physical vapor deposition; wide band gap semiconductors |
|---|---|
| College: |
Faculty of Science and Engineering |