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New high resolution liquid crystal electron beam resists

Richard Palmer Orcid Logo

Swansea University Author: Richard Palmer Orcid Logo

Published: 2000
URI: https://cronfa.swan.ac.uk/Record/cronfa49451
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spelling 2019-03-18T14:36:29.5240904 v2 49451 2019-03-18 New high resolution liquid crystal electron beam resists 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Book chapter 31 12 2000 2000-12-31 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:36:29.5240904 2019-03-18T14:36:29.5240904 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Richard Palmer 0000-0001-8728-8083 1
title New high resolution liquid crystal electron beam resists
spellingShingle New high resolution liquid crystal electron beam resists
Richard Palmer
title_short New high resolution liquid crystal electron beam resists
title_full New high resolution liquid crystal electron beam resists
title_fullStr New high resolution liquid crystal electron beam resists
title_full_unstemmed New high resolution liquid crystal electron beam resists
title_sort New high resolution liquid crystal electron beam resists
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 Richard Palmer
format Book chapter
publishDate 2000
institution Swansea University
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2000-12-31T04:00:28Z
_version_ 1763753096798797824
score 11.013619

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