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Fabrication of 10-nm Si pillars with self-formed etching masks

Tetsuya Tada, Toshihiko Kanayama, Pascal Weibel, Simon J. Carroll, Katrin Seeger, Richard Palmer Orcid Logo

Microelectronic Engineering, Volume: 35, Issue: 1-4, Pages: 293 - 296

Swansea University Author: Richard Palmer Orcid Logo

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Published in: Microelectronic Engineering
ISSN: 01679317
Published: 1997
Online Access: Check full text

URI: https://cronfa.swan.ac.uk/Record/cronfa49506
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first_indexed 2019-03-18T20:02:04Z
last_indexed 2019-03-18T20:02:04Z
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spelling 2019-03-18T14:38:42.0642865 v2 49506 2019-03-18 Fabrication of 10-nm Si pillars with self-formed etching masks 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Microelectronic Engineering 35 1-4 293 296 01679317 31 12 1997 1997-12-31 10.1016/s0167-9317(96)00129-3 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:38:42.0642865 2019-03-18T14:38:41.8694940 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Tetsuya Tada 1 Toshihiko Kanayama 2 Pascal Weibel 3 Simon J. Carroll 4 Katrin Seeger 5 Richard Palmer 0000-0001-8728-8083 6
title Fabrication of 10-nm Si pillars with self-formed etching masks
spellingShingle Fabrication of 10-nm Si pillars with self-formed etching masks
Richard Palmer
title_short Fabrication of 10-nm Si pillars with self-formed etching masks
title_full Fabrication of 10-nm Si pillars with self-formed etching masks
title_fullStr Fabrication of 10-nm Si pillars with self-formed etching masks
title_full_unstemmed Fabrication of 10-nm Si pillars with self-formed etching masks
title_sort Fabrication of 10-nm Si pillars with self-formed etching masks
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 Tetsuya Tada
Toshihiko Kanayama
Pascal Weibel
Simon J. Carroll
Katrin Seeger
Richard Palmer
format Journal article
container_title Microelectronic Engineering
container_volume 35
container_issue 1-4
container_start_page 293
publishDate 1997
institution Swansea University
issn 01679317
doi_str_mv 10.1016/s0167-9317(96)00129-3
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 1997-12-31T04:00:35Z
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score 11.037056