Journal article 573 views
Formation of 10 nm Si structures using size-selected metal clusters
Tetsuya Tada,
Toshihiko Kanayama,
Kenji Koga,
Pascal Weibel,
Simon J Carroll,
Katrin Seeger,
Richard Palmer
Journal of Physics D: Applied Physics, Volume: 31, Issue: 7, Pages: L21 - L24
Swansea University Author: Richard Palmer
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DOI (Published version): 10.1088/0022-3727/31/7/001
Abstract
Formation of 10 nm Si structures using size-selected metal clusters
Published in: | Journal of Physics D: Applied Physics |
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ISSN: | 0022-3727 1361-6463 |
Published: |
1998
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Online Access: |
Check full text
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URI: | https://cronfa.swan.ac.uk/Record/cronfa49490 |
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College: |
Faculty of Science and Engineering |
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Issue: |
7 |
Start Page: |
L21 |
End Page: |
L24 |