Journal article 619 views
Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
Applied Physics A, Volume: 78, Issue: 3, Pages: 381 - 385
Swansea University Author: Richard Palmer
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DOI (Published version): 10.1007/s00339-002-1938-y
Abstract
Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
Published in: | Applied Physics A |
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ISSN: | 0947-8396 1432-0630 |
Published: |
2004
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Online Access: |
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URI: | https://cronfa.swan.ac.uk/Record/cronfa49385 |
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College: |
Faculty of Science and Engineering |
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Issue: |
3 |
Start Page: |
381 |
End Page: |
385 |