Journal article 619 views
Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
D. Riedel,
J.L. Hernandez-Pozos,
R.E. Palmer,
K.W. Kolasinski,
Richard Palmer 
Applied Physics A, Volume: 78, Issue: 3, Pages: 381 - 385
Swansea University Author:
Richard Palmer
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DOI (Published version): 10.1007/s00339-002-1938-y
Abstract
Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
| Published in: | Applied Physics A |
|---|---|
| ISSN: | 0947-8396 1432-0630 |
| Published: |
2004
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| Online Access: |
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49385 |
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| spelling |
2019-03-18T14:34:09.8939395 v2 49385 2019-03-18 Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Applied Physics A 78 3 381 385 0947-8396 1432-0630 31 12 2004 2004-12-31 10.1007/s00339-002-1938-y COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:34:09.8939395 2019-03-18T14:34:09.6908149 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering D. Riedel 1 J.L. Hernandez-Pozos 2 R.E. Palmer 3 K.W. Kolasinski 4 Richard Palmer 0000-0001-8728-8083 5 |
| title |
Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6 |
| spellingShingle |
Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6 Richard Palmer |
| title_short |
Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6 |
| title_full |
Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6 |
| title_fullStr |
Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6 |
| title_full_unstemmed |
Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6 |
| title_sort |
Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6 |
| author_id_str_mv |
6ae369618efc7424d9774377536ea519 |
| author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
| author |
Richard Palmer |
| author2 |
D. Riedel J.L. Hernandez-Pozos R.E. Palmer K.W. Kolasinski Richard Palmer |
| format |
Journal article |
| container_title |
Applied Physics A |
| container_volume |
78 |
| container_issue |
3 |
| container_start_page |
381 |
| publishDate |
2004 |
| institution |
Swansea University |
| issn |
0947-8396 1432-0630 |
| doi_str_mv |
10.1007/s00339-002-1938-y |
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Faculty of Science and Engineering |
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|
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
| hierarchy_parent_id |
facultyofscienceandengineering |
| hierarchy_parent_title |
Faculty of Science and Engineering |
| department_str |
School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
| document_store_str |
0 |
| active_str |
0 |
| published_date |
2004-12-31T04:00:21Z |
| _version_ |
1763753088793968640 |
| score |
11.037144 |