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Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6

D. Riedel, J.L. Hernandez-Pozos, R.E. Palmer, K.W. Kolasinski, Richard Palmer Orcid Logo

Applied Physics A, Volume: 78, Issue: 3, Pages: 381 - 385

Swansea University Author: Richard Palmer Orcid Logo

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Published in: Applied Physics A
ISSN: 0947-8396 1432-0630
Published: 2004
Online Access: Check full text

URI: https://cronfa.swan.ac.uk/Record/cronfa49385
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first_indexed 2019-03-18T20:01:47Z
last_indexed 2019-03-18T20:01:47Z
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spelling 2019-03-18T14:34:09.8939395 v2 49385 2019-03-18 Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Applied Physics A 78 3 381 385 0947-8396 1432-0630 31 12 2004 2004-12-31 10.1007/s00339-002-1938-y COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:34:09.8939395 2019-03-18T14:34:09.6908149 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering D. Riedel 1 J.L. Hernandez-Pozos 2 R.E. Palmer 3 K.W. Kolasinski 4 Richard Palmer 0000-0001-8728-8083 5
title Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
spellingShingle Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
Richard Palmer
title_short Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
title_full Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
title_fullStr Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
title_full_unstemmed Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
title_sort Fabrication of ordered arrays of silicon cones by optical diffraction in ultrafast laser etching with SF6
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 D. Riedel
J.L. Hernandez-Pozos
R.E. Palmer
K.W. Kolasinski
Richard Palmer
format Journal article
container_title Applied Physics A
container_volume 78
container_issue 3
container_start_page 381
publishDate 2004
institution Swansea University
issn 0947-8396
1432-0630
doi_str_mv 10.1007/s00339-002-1938-y
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2004-12-31T04:00:21Z
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score 11.013148