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Reactive ion etching of piezoelectric Pb(ZrxTi1−x)O3 in a SF6 plasma

M. Bale, R. E. Palmer, Richard Palmer Orcid Logo

Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, Volume: 17, Issue: 5, Pages: 2467 - 2469

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1116/1.581984

Published in: Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
ISSN: 0734-2101 1520-8559
Published: 1999
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URI: https://cronfa.swan.ac.uk/Record/cronfa49475
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spelling 2019-03-18T14:37:17.3225268 v2 49475 2019-03-18 Reactive ion etching of piezoelectric Pb(ZrxTi1−x)O3 in a SF6 plasma 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Journal Article Journal of Vacuum Science &amp; Technology A: Vacuum, Surfaces, and Films 17 5 2467 2469 0734-2101 1520-8559 31 12 1999 1999-12-31 10.1116/1.581984 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:37:17.3225268 2019-03-18T14:37:17.1264502 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering M. Bale 1 R. E. Palmer 2 Richard Palmer 0000-0001-8728-8083 3
title Reactive ion etching of piezoelectric Pb(ZrxTi1−x)O3 in a SF6 plasma
spellingShingle Reactive ion etching of piezoelectric Pb(ZrxTi1−x)O3 in a SF6 plasma
Richard Palmer
title_short Reactive ion etching of piezoelectric Pb(ZrxTi1−x)O3 in a SF6 plasma
title_full Reactive ion etching of piezoelectric Pb(ZrxTi1−x)O3 in a SF6 plasma
title_fullStr Reactive ion etching of piezoelectric Pb(ZrxTi1−x)O3 in a SF6 plasma
title_full_unstemmed Reactive ion etching of piezoelectric Pb(ZrxTi1−x)O3 in a SF6 plasma
title_sort Reactive ion etching of piezoelectric Pb(ZrxTi1−x)O3 in a SF6 plasma
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 M. Bale
R. E. Palmer
Richard Palmer
format Journal article
container_title Journal of Vacuum Science &amp; Technology A: Vacuum, Surfaces, and Films
container_volume 17
container_issue 5
container_start_page 2467
publishDate 1999
institution Swansea University
issn 0734-2101
1520-8559
doi_str_mv 10.1116/1.581984
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 1999-12-31T19:51:53Z
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score 11.047609

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