No Cover Image

Book chapter 506 views

Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography

Richard Palmer Orcid Logo

Swansea University Author: Richard Palmer Orcid Logo

Published: 1999
URI: https://cronfa.swan.ac.uk/Record/cronfa49472
Tags: Add Tag
No Tags, Be the first to tag this record!
first_indexed 2019-03-18T20:01:59Z
last_indexed 2019-03-18T20:01:59Z
id cronfa49472
recordtype SURis
fullrecord <?xml version="1.0"?><rfc1807><datestamp>2019-03-18T14:37:13.1796291</datestamp><bib-version>v2</bib-version><id>49472</id><entry>2019-03-18</entry><title>Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography</title><swanseaauthors><author><sid>6ae369618efc7424d9774377536ea519</sid><ORCID>0000-0001-8728-8083</ORCID><firstname>Richard</firstname><surname>Palmer</surname><name>Richard Palmer</name><active>true</active><ethesisStudent>false</ethesisStudent></author></swanseaauthors><date>2019-03-18</date><deptcode>MECH</deptcode><abstract/><type>Book chapter</type><journal></journal><volume></volume><journalNumber></journalNumber><paginationStart/><paginationEnd/><publisher/><placeOfPublication/><isbnPrint/><isbnElectronic/><issnPrint/><issnElectronic/><keywords/><publishedDay>31</publishedDay><publishedMonth>12</publishedMonth><publishedYear>1999</publishedYear><publishedDate>1999-12-31</publishedDate><doi/><url/><notes/><college>COLLEGE NANME</college><department>Mechanical Engineering</department><CollegeCode>COLLEGE CODE</CollegeCode><DepartmentCode>MECH</DepartmentCode><institution>Swansea University</institution><apcterm/><lastEdited>2019-03-18T14:37:13.1796291</lastEdited><Created>2019-03-18T14:37:13.1796291</Created><path><level id="1">Faculty of Science and Engineering</level><level id="2">School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering</level></path><authors><author><firstname>Richard</firstname><surname>Palmer</surname><orcid>0000-0001-8728-8083</orcid><order>1</order></author></authors><documents/><OutputDurs/></rfc1807>
spelling 2019-03-18T14:37:13.1796291 v2 49472 2019-03-18 Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Book chapter 31 12 1999 1999-12-31 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:37:13.1796291 2019-03-18T14:37:13.1796291 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Richard Palmer 0000-0001-8728-8083 1
title Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
spellingShingle Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
Richard Palmer
title_short Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
title_full Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
title_fullStr Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
title_full_unstemmed Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
title_sort Fullerene derivatives as novel resist materials for fabrication of MEMS devices by electron beam lithography
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 Richard Palmer
format Book chapter
publishDate 1999
institution Swansea University
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 1999-12-31T04:00:31Z
_version_ 1763753099338448896
score 11.013799

Similar Items