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Exposure mechanism of fullerene derivative electron beam resists

A.P.G Robinson, R.E Palmer, T Tada, T Kanayama, E.J Shelley, D Philp, J.A Preece, Richard Palmer Orcid Logo

Chemical Physics Letters, Volume: 312, Issue: 5-6, Pages: 469 - 474

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1016/s0009-2614(99)00871-4

Published in: Chemical Physics Letters
ISSN: 00092614
Published: 1999
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URI: https://cronfa.swan.ac.uk/Record/cronfa49469
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first_indexed 2019-03-18T20:01:59Z
last_indexed 2019-03-18T20:01:59Z
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spelling 2019-03-18T14:37:07.1987084 v2 49469 2019-03-18 Exposure mechanism of fullerene derivative electron beam resists 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Chemical Physics Letters 312 5-6 469 474 00092614 31 12 1999 1999-12-31 10.1016/s0009-2614(99)00871-4 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:37:07.1987084 2019-03-18T14:37:06.9724434 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering A.P.G Robinson 1 R.E Palmer 2 T Tada 3 T Kanayama 4 E.J Shelley 5 D Philp 6 J.A Preece 7 Richard Palmer 0000-0001-8728-8083 8
title Exposure mechanism of fullerene derivative electron beam resists
spellingShingle Exposure mechanism of fullerene derivative electron beam resists
Richard Palmer
title_short Exposure mechanism of fullerene derivative electron beam resists
title_full Exposure mechanism of fullerene derivative electron beam resists
title_fullStr Exposure mechanism of fullerene derivative electron beam resists
title_full_unstemmed Exposure mechanism of fullerene derivative electron beam resists
title_sort Exposure mechanism of fullerene derivative electron beam resists
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 A.P.G Robinson
R.E Palmer
T Tada
T Kanayama
E.J Shelley
D Philp
J.A Preece
Richard Palmer
format Journal article
container_title Chemical Physics Letters
container_volume 312
container_issue 5-6
container_start_page 469
publishDate 1999
institution Swansea University
issn 00092614
doi_str_mv 10.1016/s0009-2614(99)00871-4
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 1999-12-31T04:00:30Z
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score 11.013686

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