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Deep plasma etching of piezoelectric PZT with SF[sub 6]

M. Bale, R. E. Palmer, Richard Palmer Orcid Logo

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Volume: 19, Issue: 6, Start page: 2020

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1116/1.1409392

Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
ISSN: 0734211X
Published: 2001
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URI: https://cronfa.swan.ac.uk/Record/cronfa49424
first_indexed 2019-03-18T20:01:53Z
last_indexed 2019-03-18T20:01:53Z
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spelling 2019-03-18T14:35:29.5266739 v2 49424 2019-03-18 Deep plasma etching of piezoelectric PZT with SF[sub 6] 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Journal Article Journal of Vacuum Science &amp; Technology B: Microelectronics and Nanometer Structures 19 6 2020 0734211X 31 12 2001 2001-12-31 10.1116/1.1409392 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:35:29.5266739 2019-03-18T14:35:29.2964405 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering M. Bale 1 R. E. Palmer 2 Richard Palmer 0000-0001-8728-8083 3
title Deep plasma etching of piezoelectric PZT with SF[sub 6]
spellingShingle Deep plasma etching of piezoelectric PZT with SF[sub 6]
Richard Palmer
title_short Deep plasma etching of piezoelectric PZT with SF[sub 6]
title_full Deep plasma etching of piezoelectric PZT with SF[sub 6]
title_fullStr Deep plasma etching of piezoelectric PZT with SF[sub 6]
title_full_unstemmed Deep plasma etching of piezoelectric PZT with SF[sub 6]
title_sort Deep plasma etching of piezoelectric PZT with SF[sub 6]
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 M. Bale
R. E. Palmer
Richard Palmer
format Journal article
container_title Journal of Vacuum Science &amp; Technology B: Microelectronics and Nanometer Structures
container_volume 19
container_issue 6
container_start_page 2020
publishDate 2001
institution Swansea University
issn 0734211X
doi_str_mv 10.1116/1.1409392
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2001-12-31T19:51:43Z
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score 11.047609

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