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Chemically amplified molecular resists for e-beam lithography

F.P. Gibbons, J. Manyam, S. Diegoli, M. Manickam, J.A. Preece, R.E. Palmer, A.P.G. Robinson, Richard Palmer Orcid Logo

Microelectronic Engineering, Volume: 85, Issue: 5-6, Pages: 764 - 767

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1016/j.mee.2007.12.001

Published in: Microelectronic Engineering
ISSN: 01679317
Published: 2008
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URI: https://cronfa.swan.ac.uk/Record/cronfa49326
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first_indexed 2019-03-18T20:01:39Z
last_indexed 2019-03-18T20:01:39Z
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spelling 2019-03-18T14:32:08.4287609 v2 49326 2019-03-18 Chemically amplified molecular resists for e-beam lithography 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Microelectronic Engineering 85 5-6 764 767 01679317 31 12 2008 2008-12-31 10.1016/j.mee.2007.12.001 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:32:08.4287609 2019-03-18T14:32:08.1867172 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering F.P. Gibbons 1 J. Manyam 2 S. Diegoli 3 M. Manickam 4 J.A. Preece 5 R.E. Palmer 6 A.P.G. Robinson 7 Richard Palmer 0000-0001-8728-8083 8
title Chemically amplified molecular resists for e-beam lithography
spellingShingle Chemically amplified molecular resists for e-beam lithography
Richard Palmer
title_short Chemically amplified molecular resists for e-beam lithography
title_full Chemically amplified molecular resists for e-beam lithography
title_fullStr Chemically amplified molecular resists for e-beam lithography
title_full_unstemmed Chemically amplified molecular resists for e-beam lithography
title_sort Chemically amplified molecular resists for e-beam lithography
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 F.P. Gibbons
J. Manyam
S. Diegoli
M. Manickam
J.A. Preece
R.E. Palmer
A.P.G. Robinson
Richard Palmer
format Journal article
container_title Microelectronic Engineering
container_volume 85
container_issue 5-6
container_start_page 764
publishDate 2008
institution Swansea University
issn 01679317
doi_str_mv 10.1016/j.mee.2007.12.001
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 2008-12-31T04:00:14Z
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score 11.037144

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