Journal article 607 views
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
H.M. Zaid,
M. Manickam,
J.A. Preece,
R.E. Palmer,
A.P.G. Robinson,
Richard Palmer 
Microelectronic Engineering, Volume: 85, Issue: 7, Pages: 1540 - 1544
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1016/j.mee.2008.02.009
Abstract
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
| Published in: | Microelectronic Engineering |
|---|---|
| ISSN: | 01679317 |
| Published: |
2008
|
| Online Access: |
Check full text
|
| URI: | https://cronfa.swan.ac.uk/Record/cronfa49323 |
| Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
| first_indexed |
2019-03-18T20:01:39Z |
|---|---|
| last_indexed |
2019-03-18T20:01:39Z |
| id |
cronfa49323 |
| recordtype |
SURis |
| fullrecord |
<?xml version="1.0"?><rfc1807><datestamp>2019-03-18T14:32:04.6088503</datestamp><bib-version>v2</bib-version><id>49323</id><entry>2019-03-18</entry><title>Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker</title><swanseaauthors><author><sid>6ae369618efc7424d9774377536ea519</sid><ORCID>0000-0001-8728-8083</ORCID><firstname>Richard</firstname><surname>Palmer</surname><name>Richard Palmer</name><active>true</active><ethesisStudent>false</ethesisStudent></author></swanseaauthors><date>2019-03-18</date><deptcode>MECH</deptcode><abstract/><type>Journal Article</type><journal>Microelectronic Engineering</journal><volume>85</volume><journalNumber>7</journalNumber><paginationStart>1540</paginationStart><paginationEnd>1544</paginationEnd><publisher/><placeOfPublication/><isbnPrint/><isbnElectronic/><issnPrint>01679317</issnPrint><issnElectronic/><keywords/><publishedDay>31</publishedDay><publishedMonth>12</publishedMonth><publishedYear>2008</publishedYear><publishedDate>2008-12-31</publishedDate><doi>10.1016/j.mee.2008.02.009</doi><url/><notes/><college>COLLEGE NANME</college><department>Mechanical Engineering</department><CollegeCode>COLLEGE CODE</CollegeCode><DepartmentCode>MECH</DepartmentCode><institution>Swansea University</institution><apcterm/><lastEdited>2019-03-18T14:32:04.6088503</lastEdited><Created>2019-03-18T14:32:04.4065253</Created><path><level id="1">Faculty of Science and Engineering</level><level id="2">School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering</level></path><authors><author><firstname>H.M.</firstname><surname>Zaid</surname><order>1</order></author><author><firstname>M.</firstname><surname>Manickam</surname><order>2</order></author><author><firstname>J.A.</firstname><surname>Preece</surname><order>3</order></author><author><firstname>R.E.</firstname><surname>Palmer</surname><order>4</order></author><author><firstname>A.P.G.</firstname><surname>Robinson</surname><order>5</order></author><author><firstname>Richard</firstname><surname>Palmer</surname><orcid>0000-0001-8728-8083</orcid><order>6</order></author></authors><documents/><OutputDurs/></rfc1807> |
| spelling |
2019-03-18T14:32:04.6088503 v2 49323 2019-03-18 Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Microelectronic Engineering 85 7 1540 1544 01679317 31 12 2008 2008-12-31 10.1016/j.mee.2008.02.009 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:32:04.6088503 2019-03-18T14:32:04.4065253 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering H.M. Zaid 1 M. Manickam 2 J.A. Preece 3 R.E. Palmer 4 A.P.G. Robinson 5 Richard Palmer 0000-0001-8728-8083 6 |
| title |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker |
| spellingShingle |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker Richard Palmer |
| title_short |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker |
| title_full |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker |
| title_fullStr |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker |
| title_full_unstemmed |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker |
| title_sort |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker |
| author_id_str_mv |
6ae369618efc7424d9774377536ea519 |
| author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
| author |
Richard Palmer |
| author2 |
H.M. Zaid M. Manickam J.A. Preece R.E. Palmer A.P.G. Robinson Richard Palmer |
| format |
Journal article |
| container_title |
Microelectronic Engineering |
| container_volume |
85 |
| container_issue |
7 |
| container_start_page |
1540 |
| publishDate |
2008 |
| institution |
Swansea University |
| issn |
01679317 |
| doi_str_mv |
10.1016/j.mee.2008.02.009 |
| college_str |
Faculty of Science and Engineering |
| hierarchytype |
|
| hierarchy_top_id |
facultyofscienceandengineering |
| hierarchy_top_title |
Faculty of Science and Engineering |
| hierarchy_parent_id |
facultyofscienceandengineering |
| hierarchy_parent_title |
Faculty of Science and Engineering |
| department_str |
School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
| document_store_str |
0 |
| active_str |
0 |
| published_date |
2008-12-31T04:00:14Z |
| _version_ |
1763753081437159424 |
| score |
11.0133505 |