Journal article 683 views
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
H.M. Zaid,
M. Manickam,
J.A. Preece,
R.E. Palmer,
A.P.G. Robinson,
Richard Palmer 
Microelectronic Engineering, Volume: 85, Issue: 7, Pages: 1540 - 1544
Swansea University Author:
Richard Palmer
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DOI (Published version): 10.1016/j.mee.2008.02.009
Abstract
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker
| Published in: | Microelectronic Engineering |
|---|---|
| ISSN: | 01679317 |
| Published: |
2008
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| Online Access: |
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49323 |
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2019-03-18T14:32:04.6088503 v2 49323 2019-03-18 Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Microelectronic Engineering 85 7 1540 1544 01679317 31 12 2008 2008-12-31 10.1016/j.mee.2008.02.009 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:32:04.6088503 2019-03-18T14:32:04.4065253 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering H.M. Zaid 1 M. Manickam 2 J.A. Preece 3 R.E. Palmer 4 A.P.G. Robinson 5 Richard Palmer 0000-0001-8728-8083 6 |
| title |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker |
| spellingShingle |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker Richard Palmer |
| title_short |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker |
| title_full |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker |
| title_fullStr |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker |
| title_full_unstemmed |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker |
| title_sort |
Anomalous acid diffusion in a triphenylene molecular resist with melamine crosslinker |
| author_id_str_mv |
6ae369618efc7424d9774377536ea519 |
| author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
| author |
Richard Palmer |
| author2 |
H.M. Zaid M. Manickam J.A. Preece R.E. Palmer A.P.G. Robinson Richard Palmer |
| format |
Journal article |
| container_title |
Microelectronic Engineering |
| container_volume |
85 |
| container_issue |
7 |
| container_start_page |
1540 |
| publishDate |
2008 |
| institution |
Swansea University |
| issn |
01679317 |
| doi_str_mv |
10.1016/j.mee.2008.02.009 |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
| department_str |
School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
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| published_date |
2008-12-31T04:00:14Z |
| _version_ |
1763753081437159424 |
| score |
11.037144 |