Journal article 578 views
Plasma Etching of High-resolution Features in a Fullerene Molecular Resist
Robert D. Allen,
J. Manyam,
Mark H. Somervell,
M. Manickam,
J. A. Preece,
R. E. Palmer,
A. P. G. Robinson,
Richard Palmer
Swansea University Author: Richard Palmer
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DOI (Published version): 10.1117/12.879469
Abstract
Plasma Etching of High-resolution Features in a Fullerene Molecular Resist
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2011
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URI: | https://cronfa.swan.ac.uk/Record/cronfa49300 |
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2019-03-18T20:01:36Z |
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2019-03-18T14:31:20.1439337 v2 49300 2019-03-18 Plasma Etching of High-resolution Features in a Fullerene Molecular Resist 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Journal Article 31 12 2011 2011-12-31 10.1117/12.879469 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:31:20.1439337 2019-03-18T14:31:19.9014907 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Robert D. Allen 1 J. Manyam 2 Mark H. Somervell 3 M. Manickam 4 J. A. Preece 5 R. E. Palmer 6 A. P. G. Robinson 7 Richard Palmer 0000-0001-8728-8083 8 |
title |
Plasma Etching of High-resolution Features in a Fullerene Molecular Resist |
spellingShingle |
Plasma Etching of High-resolution Features in a Fullerene Molecular Resist Richard Palmer |
title_short |
Plasma Etching of High-resolution Features in a Fullerene Molecular Resist |
title_full |
Plasma Etching of High-resolution Features in a Fullerene Molecular Resist |
title_fullStr |
Plasma Etching of High-resolution Features in a Fullerene Molecular Resist |
title_full_unstemmed |
Plasma Etching of High-resolution Features in a Fullerene Molecular Resist |
title_sort |
Plasma Etching of High-resolution Features in a Fullerene Molecular Resist |
author_id_str_mv |
6ae369618efc7424d9774377536ea519 |
author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
author |
Richard Palmer |
author2 |
Robert D. Allen J. Manyam Mark H. Somervell M. Manickam J. A. Preece R. E. Palmer A. P. G. Robinson Richard Palmer |
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Journal article |
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2011 |
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Swansea University |
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10.1117/12.879469 |
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Faculty of Science and Engineering |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
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published_date |
2011-12-31T02:03:47Z |
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1821459798094249984 |
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11.064692 |