Journal article 572 views
Positive tone chemically amplified fullerene resist
Mark H. Somervell,
J. Manyam,
A. Frommhold,
D. X. Yang,
A. McClelland,
M. Manickam,
J. A. Preece,
R. E. Palmer,
A. P. G. Robinson,
Thomas I. Wallow,
Richard Palmer 
Swansea University Author:
Richard Palmer
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DOI (Published version): 10.1117/12.916472
Abstract
Positive tone chemically amplified fullerene resist
| Published: |
2012
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49291 |
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| College: |
Faculty of Science and Engineering |
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