Journal article 974 views
Chemically amplified phenolic fullerene electron beam resist
Journal of Materials Chemistry C, Volume: 2, Issue: 8, Start page: 1505
Swansea University Author: Richard Palmer
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DOI (Published version): 10.1039/c3tc31896f
Abstract
Chemically amplified phenolic fullerene electron beam resist
Published in: | Journal of Materials Chemistry C |
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ISSN: | 2050-7526 2050-7534 |
Published: |
2014
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Online Access: |
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URI: | https://cronfa.swan.ac.uk/Record/cronfa49259 |
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College: |
Faculty of Science and Engineering |
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Issue: |
8 |
Start Page: |
1505 |