Journal article 974 views
Chemically amplified phenolic fullerene electron beam resist
Journal of Materials Chemistry C, Volume: 2, Issue: 8, Start page: 1505
Swansea University Author: Richard Palmer
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DOI (Published version): 10.1039/c3tc31896f
Abstract
Chemically amplified phenolic fullerene electron beam resist
Published in: | Journal of Materials Chemistry C |
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ISSN: | 2050-7526 2050-7534 |
Published: |
2014
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URI: | https://cronfa.swan.ac.uk/Record/cronfa49259 |
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2019-03-18T14:29:42.3179250 v2 49259 2019-03-18 Chemically amplified phenolic fullerene electron beam resist 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Journal of Materials Chemistry C 2 8 1505 2050-7526 2050-7534 31 12 2014 2014-12-31 10.1039/c3tc31896f COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:29:42.3179250 2019-03-18T14:29:42.0995255 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering D. X. Yang 1 A. Frommhold 2 X. Xue 3 R. E. Palmer 4 A. P. G. Robinson 5 Richard Palmer 0000-0001-8728-8083 6 |
title |
Chemically amplified phenolic fullerene electron beam resist |
spellingShingle |
Chemically amplified phenolic fullerene electron beam resist Richard Palmer |
title_short |
Chemically amplified phenolic fullerene electron beam resist |
title_full |
Chemically amplified phenolic fullerene electron beam resist |
title_fullStr |
Chemically amplified phenolic fullerene electron beam resist |
title_full_unstemmed |
Chemically amplified phenolic fullerene electron beam resist |
title_sort |
Chemically amplified phenolic fullerene electron beam resist |
author_id_str_mv |
6ae369618efc7424d9774377536ea519 |
author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
author |
Richard Palmer |
author2 |
D. X. Yang A. Frommhold X. Xue R. E. Palmer A. P. G. Robinson Richard Palmer |
format |
Journal article |
container_title |
Journal of Materials Chemistry C |
container_volume |
2 |
container_issue |
8 |
container_start_page |
1505 |
publishDate |
2014 |
institution |
Swansea University |
issn |
2050-7526 2050-7534 |
doi_str_mv |
10.1039/c3tc31896f |
college_str |
Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
department_str |
School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
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published_date |
2014-12-31T04:00:06Z |
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1763753073578082304 |
score |
11.037253 |