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Chemically amplified phenolic fullerene electron beam resist

D. X. Yang, A. Frommhold, X. Xue, R. E. Palmer, A. P. G. Robinson, Richard Palmer Orcid Logo

Journal of Materials Chemistry C, Volume: 2, Issue: 8, Start page: 1505

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1039/c3tc31896f

Published in: Journal of Materials Chemistry C
ISSN: 2050-7526 2050-7534
Published: 2014
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URI: https://cronfa.swan.ac.uk/Record/cronfa49259
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first_indexed 2019-03-18T20:01:30Z
last_indexed 2019-03-18T20:01:30Z
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spelling 2019-03-18T14:29:42.3179250 v2 49259 2019-03-18 Chemically amplified phenolic fullerene electron beam resist 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article Journal of Materials Chemistry C 2 8 1505 2050-7526 2050-7534 31 12 2014 2014-12-31 10.1039/c3tc31896f COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:29:42.3179250 2019-03-18T14:29:42.0995255 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering D. X. Yang 1 A. Frommhold 2 X. Xue 3 R. E. Palmer 4 A. P. G. Robinson 5 Richard Palmer 0000-0001-8728-8083 6
title Chemically amplified phenolic fullerene electron beam resist
spellingShingle Chemically amplified phenolic fullerene electron beam resist
Richard Palmer
title_short Chemically amplified phenolic fullerene electron beam resist
title_full Chemically amplified phenolic fullerene electron beam resist
title_fullStr Chemically amplified phenolic fullerene electron beam resist
title_full_unstemmed Chemically amplified phenolic fullerene electron beam resist
title_sort Chemically amplified phenolic fullerene electron beam resist
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 D. X. Yang
A. Frommhold
X. Xue
R. E. Palmer
A. P. G. Robinson
Richard Palmer
format Journal article
container_title Journal of Materials Chemistry C
container_volume 2
container_issue 8
container_start_page 1505
publishDate 2014
institution Swansea University
issn 2050-7526
2050-7534
doi_str_mv 10.1039/c3tc31896f
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
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published_date 2014-12-31T04:00:06Z
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