Book chapter 836 views
Microactuators
Lijie Li 
,
Zheng J. Chew
,
Zheng J. Chew
Smart Sensors and MEMs, Issue: 2nd, Pages: 313 - 354
Swansea University Author:
Lijie Li
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DOI (Published version): 10.1016/B978-0-08-102055-5.00012-7
Abstract
Microactuators are emerging as important tools that are capable of performing the tasks of conventional tools in the macroworld, but they are much smaller and allow greater precision. A review of electrostatic, piezoelectric, and electrothermal microactuators is presented. The basics of these three...
| Published in: | Smart Sensors and MEMs |
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| ISBN: | 9780081020555 |
| Published: |
Duxford, UK
Woodhead Publishing
2019
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa40363 |
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| Abstract: |
Microactuators are emerging as important tools that are capable of performing the tasks of conventional tools in the macroworld, but they are much smaller and allow greater precision. A review of electrostatic, piezoelectric, and electrothermal microactuators is presented. The basics of these three actuation principles and characteristics are briefly explained to highlight the motivation behind the selection of different microactuators. Various design models of electrostatic, piezoelectric, and electrothermal microactuators are described and compared from the perspective of the mechanism and output performance. Limitations of existing designs are identified to improve some of these microactuators to gain better performance or reliability. Finally, key challenges in different microfabrication techniques associated with their process and compatibility with commercial foundries are highlighted, as this aspect decides the viability of microactuators commercially and economically. |
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| Keywords: |
Electrostatic; Microelectromechanical systems (MEMS); Piezoelectric and electrothermal microactuators |
| College: |
Faculty of Science and Engineering |
| Issue: |
2nd |
| Start Page: |
313 |
| End Page: |
354 |