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Microactuators

Lijie Li Orcid Logo, Zheng J. Chew

Smart Sensors and MEMs, Issue: 2nd, Pages: 313 - 354

Swansea University Author: Lijie Li Orcid Logo

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DOI (Published version): 10.1016/B978-0-08-102055-5.00012-7

Abstract

Microactuators are emerging as important tools that are capable of performing the tasks of conventional tools in the macroworld, but they are much smaller and allow greater precision. A review of electrostatic, piezoelectric, and electrothermal microactuators is presented. The basics of these three...

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Published in: Smart Sensors and MEMs
ISBN: 9780081020555
Published: Duxford, UK Woodhead Publishing 2019
URI: https://cronfa.swan.ac.uk/Record/cronfa40363
first_indexed 2018-05-23T19:01:33Z
last_indexed 2018-05-23T19:01:33Z
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spelling 2018-05-23T13:47:53.2558385 v2 40363 2018-05-23 Microactuators ed2c658b77679a28e4c1dcf95af06bd6 0000-0003-4630-7692 Lijie Li Lijie Li true false 2018-05-23 ACEM Microactuators are emerging as important tools that are capable of performing the tasks of conventional tools in the macroworld, but they are much smaller and allow greater precision. A review of electrostatic, piezoelectric, and electrothermal microactuators is presented. The basics of these three actuation principles and characteristics are briefly explained to highlight the motivation behind the selection of different microactuators. Various design models of electrostatic, piezoelectric, and electrothermal microactuators are described and compared from the perspective of the mechanism and output performance. Limitations of existing designs are identified to improve some of these microactuators to gain better performance or reliability. Finally, key challenges in different microfabrication techniques associated with their process and compatibility with commercial foundries are highlighted, as this aspect decides the viability of microactuators commercially and economically. Book chapter Smart Sensors and MEMs 2nd 313 354 Woodhead Publishing Duxford, UK 9780081020555 Electrostatic; Microelectromechanical systems (MEMS); Piezoelectric and electrothermal microactuators 31 12 2019 2019-12-31 10.1016/B978-0-08-102055-5.00012-7 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2018-05-23T13:47:53.2558385 2018-05-23T13:42:26.3075186 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering Lijie Li 0000-0003-4630-7692 1 Zheng J. Chew 2
title Microactuators
spellingShingle Microactuators
Lijie Li
title_short Microactuators
title_full Microactuators
title_fullStr Microactuators
title_full_unstemmed Microactuators
title_sort Microactuators
author_id_str_mv ed2c658b77679a28e4c1dcf95af06bd6
author_id_fullname_str_mv ed2c658b77679a28e4c1dcf95af06bd6_***_Lijie Li
author Lijie Li
author2 Lijie Li
Zheng J. Chew
format Book chapter
container_title Smart Sensors and MEMs
container_issue 2nd
container_start_page 313
publishDate 2019
institution Swansea University
isbn 9780081020555
doi_str_mv 10.1016/B978-0-08-102055-5.00012-7
publisher Woodhead Publishing
college_str Faculty of Science and Engineering
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hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering
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description Microactuators are emerging as important tools that are capable of performing the tasks of conventional tools in the macroworld, but they are much smaller and allow greater precision. A review of electrostatic, piezoelectric, and electrothermal microactuators is presented. The basics of these three actuation principles and characteristics are briefly explained to highlight the motivation behind the selection of different microactuators. Various design models of electrostatic, piezoelectric, and electrothermal microactuators are described and compared from the perspective of the mechanism and output performance. Limitations of existing designs are identified to improve some of these microactuators to gain better performance or reliability. Finally, key challenges in different microfabrication techniques associated with their process and compatibility with commercial foundries are highlighted, as this aspect decides the viability of microactuators commercially and economically.
published_date 2019-12-31T19:34:44Z
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score 11.13852

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