Journal article 1360 views
Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator
L. Li,
J. Zawadzka,
D. Uttamchandani,
Lijie Li 
Journal of Microelectromechanical Systems, Volume: 13, Issue: 1, Pages: 83 - 90
Swansea University Author:
Lijie Li
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DOI (Published version): 10.1109/JMEMS.2003.823222
Abstract
Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator
| Published in: | Journal of Microelectromechanical Systems |
|---|---|
| Published: |
2004
|
| URI: | https://cronfa.swan.ac.uk/Record/cronfa26520 |
| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
1 |
| Start Page: |
83 |
| End Page: |
90 |