Li, L., Li, L., Zawadzka, J., & Uttamchandani, D. (2004). Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator. Journal of Microelectromechanical Systems, 13(1), pp. 83-90. doi:10.1109/JMEMS.2003.823222
Chicago Style CitationLi, Lijie, L. Li, J. Zawadzka, and D. Uttamchandani. "Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator." Journal of Microelectromechanical Systems 13, no. 1 (2004): 83-90.
MLA CitationLi, Lijie, L. Li, J. Zawadzka, and D. Uttamchandani. "Integrated Self-Assembling and Holding Technique Applied to a 3-D MEMS Variable Optical Attenuator." Journal of Microelectromechanical Systems 13.1 (2004): 83-90.
Warning: These citations may not always be 100% accurate.