Journal article 1141 views
Design, simulation and characterization of a MEMS optical scanner
Lijie Li 
,
Mark Begbie,
Gordon Brown,
Deepak Uttamchandani
,
Mark Begbie,
Gordon Brown,
Deepak Uttamchandani
Journal of Micromechanics and Microengineering, Volume: 17, Issue: 9, Pages: 1781 - 1787
Swansea University Author:
Lijie Li
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DOI (Published version): 10.1088/0960-1317/17/9/005
Abstract
Design, simulation and characterization of a MEMS optical scanner
| Published in: | Journal of Micromechanics and Microengineering |
|---|---|
| Published: |
2007
|
| URI: | https://cronfa.swan.ac.uk/Record/cronfa20755 |
| Tags: |
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| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
9 |
| Start Page: |
1781 |
| End Page: |
1787 |