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Streamlining Accurate 4D-STEM Phase-Orientation Analysis of Polymorphic Polycrystalline Thin Films in Semiconductor TEM Labs for Routine Application

Daniel Nemecek, Tiantian Chai, Zabeada Aslam, Andy Brown, Rik Drummond-Brydson, Gregory Burwell Orcid Logo, Paul Meredith Orcid Logo

ISTFA 2025: Conference Proceedings from the 51st International Symposium for Testing and Failure Analysis, Pages: 589 - 593

Swansea University Authors: Gregory Burwell Orcid Logo, Paul Meredith Orcid Logo

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Published in: ISTFA 2025: Conference Proceedings from the 51st International Symposium for Testing and Failure Analysis
ISSN: 0890-1740
Published: ASM International 2025
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URI: https://cronfa.swan.ac.uk/Record/cronfa70959
first_indexed 2025-11-21T13:22:38Z
last_indexed 2025-11-22T05:32:26Z
id cronfa70959
recordtype SURis
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spelling 2025-11-21T13:45:31.3099449 v2 70959 2025-11-21 Streamlining Accurate 4D-STEM Phase-Orientation Analysis of Polymorphic Polycrystalline Thin Films in Semiconductor TEM Labs for Routine Application 49890fbfbe127d4ae94bc10dc2b24199 0000-0002-2534-9626 Gregory Burwell Gregory Burwell true false 31e8fe57fa180d418afd48c3af280c2e 0000-0002-9049-7414 Paul Meredith Paul Meredith true false 2025-11-21 BGPS Conference Paper/Proceeding/Abstract ISTFA 2025: Conference Proceedings from the 51st International Symposium for Testing and Failure Analysis 589 593 ASM International 0890-1740 deep learning, electron diffraction, nanoscale, phase orientation analysis, polymorphic polycrystalline thin films, scanning transmission electron microscopy, semiconductor devices 16 11 2025 2025-11-16 10.31399/asm.cp.istfa2025p0589 COLLEGE NANME Biosciences Geography and Physics School COLLEGE CODE BGPS Swansea University Not Required Tiantian Chai acknowledges a UK Engineering and Physical Sciences Research Council CASE Studentship award (with Tescan). P.M. and G.B. are funded by UKRI through the Research England RPIF Program ‘Centre for Integrative Semiconductor Materials’. The work was supported by the Avenues of Commercialisation for Nano & Micro technologies (ACNM) through the Welsh European Funding Office. This work was further supported by the Welsh Government’s Sêr Cymru II Rising Star and Capacity Builder Accelerator Programs through the European Regional Development Fund, Welsh European Funding Office, and Swansea University Strategic Initiative in Sustainable Advanced Materials. P.M.is a Sêr Cymru II National Research Chair. 2025-11-21T13:45:31.3099449 2025-11-21T11:32:12.9460119 Faculty of Science and Engineering School of Biosciences, Geography and Physics - Physics Daniel Nemecek 1 Tiantian Chai 2 Zabeada Aslam 3 Andy Brown 4 Rik Drummond-Brydson 5 Gregory Burwell 0000-0002-2534-9626 6 Paul Meredith 0000-0002-9049-7414 7
title Streamlining Accurate 4D-STEM Phase-Orientation Analysis of Polymorphic Polycrystalline Thin Films in Semiconductor TEM Labs for Routine Application
spellingShingle Streamlining Accurate 4D-STEM Phase-Orientation Analysis of Polymorphic Polycrystalline Thin Films in Semiconductor TEM Labs for Routine Application
Gregory Burwell
Paul Meredith
title_short Streamlining Accurate 4D-STEM Phase-Orientation Analysis of Polymorphic Polycrystalline Thin Films in Semiconductor TEM Labs for Routine Application
title_full Streamlining Accurate 4D-STEM Phase-Orientation Analysis of Polymorphic Polycrystalline Thin Films in Semiconductor TEM Labs for Routine Application
title_fullStr Streamlining Accurate 4D-STEM Phase-Orientation Analysis of Polymorphic Polycrystalline Thin Films in Semiconductor TEM Labs for Routine Application
title_full_unstemmed Streamlining Accurate 4D-STEM Phase-Orientation Analysis of Polymorphic Polycrystalline Thin Films in Semiconductor TEM Labs for Routine Application
title_sort Streamlining Accurate 4D-STEM Phase-Orientation Analysis of Polymorphic Polycrystalline Thin Films in Semiconductor TEM Labs for Routine Application
author_id_str_mv 49890fbfbe127d4ae94bc10dc2b24199
31e8fe57fa180d418afd48c3af280c2e
author_id_fullname_str_mv 49890fbfbe127d4ae94bc10dc2b24199_***_Gregory Burwell
31e8fe57fa180d418afd48c3af280c2e_***_Paul Meredith
author Gregory Burwell
Paul Meredith
author2 Daniel Nemecek
Tiantian Chai
Zabeada Aslam
Andy Brown
Rik Drummond-Brydson
Gregory Burwell
Paul Meredith
format Conference Paper/Proceeding/Abstract
container_title ISTFA 2025: Conference Proceedings from the 51st International Symposium for Testing and Failure Analysis
container_start_page 589
publishDate 2025
institution Swansea University
issn 0890-1740
doi_str_mv 10.31399/asm.cp.istfa2025p0589
publisher ASM International
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Biosciences, Geography and Physics - Physics{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Biosciences, Geography and Physics - Physics
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published_date 2025-11-16T05:30:50Z
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