Streamlining Accurate 4D-STEM Phase-Orientation Analysis of Polymorphic Polycrystalline Thin Films in Semiconductor TEM Labs for Routine Application

Conference Paper/Proceeding/Abstract 72 views

Daniel Nemecek, Tiantian Chai, Zabeada Aslam, Andy Brown, Rik Drummond-Brydson, Gregory Burwell

, Paul Meredith

ISTFA 2025: Conference Proceedings from the 51st International Symposium for Testing and Failure Analysis, Pages: 589 - 593

Swansea University Authors: Gregory Burwell , Paul Meredith

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DOI (Published version): 10.31399/asm.cp.istfa2025p0589

Published in:	ISTFA 2025: Conference Proceedings from the 51st International Symposium for Testing and Failure Analysis
ISSN:	0890-1740
Published:	ASM International 2025
Online Access:	Check full text
URI:	https://cronfa.swan.ac.uk/Record/cronfa70959

Keywords:	deep learning, electron diffraction, nanoscale, phase orientation analysis, polymorphic polycrystalline thin films, scanning transmission electron microscopy, semiconductor devices
College:	Faculty of Science and Engineering
Funders:	Tiantian Chai acknowledges a UK Engineering and Physical Sciences Research Council CASE Studentship award (with Tescan). P.M. and G.B. are funded by UKRI through the Research England RPIF Program ‘Centre for Integrative Semiconductor Materials’. The work was supported by the Avenues of Commercialisation for Nano & Micro technologies (ACNM) through the Welsh European Funding Office. This work was further supported by the Welsh Government’s Sêr Cymru II Rising Star and Capacity Builder Accelerator Programs through the European Regional Development Fund, Welsh European Funding Office, and Swansea University Strategic Initiative in Sustainable Advanced Materials. P.M.is a Sêr Cymru II National Research Chair.
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