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Dynamic response modelling and characterization of a vertical electrothermal actuator

Li Lijie, Deepak Uttamchandani, Lijie Li Orcid Logo

Journal of Micromechanics and Microengineering, Volume: 19, Issue: 7, Start page: 075014

Swansea University Author: Lijie Li Orcid Logo

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DOI (Published version): 10.1088/0960-1317/19/7/075014

Abstract

Electrothermal actuators have attracted many interests from international researchers due to their large displacement and force. This work reports a novel modelling on the dynamic response of the vertical electrothermal actuators that were fabricated by silicon foundry. The results will provide impo...

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Published in: Journal of Micromechanics and Microengineering
ISSN: 0960-1317 1361-6439
Published: 2009
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URI: https://cronfa.swan.ac.uk/Record/cronfa6098
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first_indexed 2013-07-23T11:56:12Z
last_indexed 2018-02-09T04:33:17Z
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spelling 2016-08-16T11:30:45.1784772 v2 6098 2013-09-03 Dynamic response modelling and characterization of a vertical electrothermal actuator ed2c658b77679a28e4c1dcf95af06bd6 0000-0003-4630-7692 Lijie Li Lijie Li true false 2013-09-03 EEEG Electrothermal actuators have attracted many interests from international researchers due to their large displacement and force. This work reports a novel modelling on the dynamic response of the vertical electrothermal actuators that were fabricated by silicon foundry. The results will provide important guidance to researchers and engineers. Journal Article Journal of Micromechanics and Microengineering 19 7 075014 0960-1317 1361-6439 31 12 2009 2009-12-31 10.1088/0960-1317/19/7/075014 Although lots of work surrounding electrothermal actuators has been reported previously, their dynamic behaviour (thermal and mechanical) has not been fully understood. An interesting finding is: the cold beam of the electrothermal actuator is not only a mechanical constraint, but also a compensator for increasing the thermal response of the whole structure. Experimental case study was also presented in this article. COLLEGE NANME Electronic and Electrical Engineering COLLEGE CODE EEEG Swansea University 2016-08-16T11:30:45.1784772 2013-09-03T06:37:02.0000000 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering Li Lijie 1 Deepak Uttamchandani 2 Lijie Li 0000-0003-4630-7692 3
title Dynamic response modelling and characterization of a vertical electrothermal actuator
spellingShingle Dynamic response modelling and characterization of a vertical electrothermal actuator
Lijie Li
title_short Dynamic response modelling and characterization of a vertical electrothermal actuator
title_full Dynamic response modelling and characterization of a vertical electrothermal actuator
title_fullStr Dynamic response modelling and characterization of a vertical electrothermal actuator
title_full_unstemmed Dynamic response modelling and characterization of a vertical electrothermal actuator
title_sort Dynamic response modelling and characterization of a vertical electrothermal actuator
author_id_str_mv ed2c658b77679a28e4c1dcf95af06bd6
author_id_fullname_str_mv ed2c658b77679a28e4c1dcf95af06bd6_***_Lijie Li
author Lijie Li
author2 Li Lijie
Deepak Uttamchandani
Lijie Li
format Journal article
container_title Journal of Micromechanics and Microengineering
container_volume 19
container_issue 7
container_start_page 075014
publishDate 2009
institution Swansea University
issn 0960-1317
1361-6439
doi_str_mv 10.1088/0960-1317/19/7/075014
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering
document_store_str 0
active_str 0
description Electrothermal actuators have attracted many interests from international researchers due to their large displacement and force. This work reports a novel modelling on the dynamic response of the vertical electrothermal actuators that were fabricated by silicon foundry. The results will provide important guidance to researchers and engineers.
published_date 2009-12-31T03:07:31Z
_version_ 1763749764599382016
score 11.013731

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