Journal article 984 views
Dynamic response modelling and characterization of a vertical electrothermal actuator
Journal of Micromechanics and Microengineering, Volume: 19, Issue: 7, Start page: 075014
Swansea University Author:
Lijie Li
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DOI (Published version): 10.1088/0960-1317/19/7/075014
Abstract
Electrothermal actuators have attracted many interests from international researchers due to their large displacement and force. This work reports a novel modelling on the dynamic response of the vertical electrothermal actuators that were fabricated by silicon foundry. The results will provide impo...
| Published in: | Journal of Micromechanics and Microengineering |
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| ISSN: | 0960-1317 1361-6439 |
| Published: |
2009
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| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa6098 |
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| Abstract: |
Electrothermal actuators have attracted many interests from international researchers due to their large displacement and force. This work reports a novel modelling on the dynamic response of the vertical electrothermal actuators that were fabricated by silicon foundry. The results will provide important guidance to researchers and engineers. |
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| Item Description: |
Although lots of work surrounding electrothermal actuators has been reported previously, their dynamic behaviour (thermal and mechanical) has not been fully understood. An interesting finding is: the cold beam of the electrothermal actuator is not only a mechanical constraint, but also a compensator for increasing the thermal response of the whole structure. Experimental case study was also presented in this article. |
| College: |
Faculty of Science and Engineering |
| Issue: |
7 |
| Start Page: |
075014 |