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Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC

A Pérez-Tomás, M Lodzinski, O. J Guy, M. R Jennings, M Placidi, J Llobet, P. M Gammon, M. C Davis, J. A Covington, S. E Burrows, P. A Mawby, Owen Guy Orcid Logo

Applied Physics Letters, Volume: 94, Issue: 10, Start page: 103510

Swansea University Author: Owen Guy Orcid Logo

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DOI (Published version): 10.1063/1.3099018

Published in: Applied Physics Letters
ISSN: 0003-6951
Published: 2009
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URI: https://cronfa.swan.ac.uk/Record/cronfa5657
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first_indexed 2013-07-23T11:53:20Z
last_indexed 2018-02-09T04:32:19Z
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fullrecord <?xml version="1.0"?><rfc1807><datestamp>2016-08-16T11:36:00.1821698</datestamp><bib-version>v2</bib-version><id>5657</id><entry>2013-09-03</entry><title>Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC</title><swanseaauthors><author><sid>c7fa5949b8528e048c5b978005f66794</sid><ORCID>0000-0002-6449-4033</ORCID><firstname>Owen</firstname><surname>Guy</surname><name>Owen Guy</name><active>true</active><ethesisStudent>false</ethesisStudent></author></swanseaauthors><date>2013-09-03</date><deptcode>CHEM</deptcode><abstract></abstract><type>Journal Article</type><journal>Applied Physics Letters</journal><volume>94</volume><journalNumber>10</journalNumber><paginationStart>103510</paginationStart><publisher/><issnPrint>0003-6951</issnPrint><keywords/><publishedDay>31</publishedDay><publishedMonth>12</publishedMonth><publishedYear>2009</publishedYear><publishedDate>2009-12-31</publishedDate><doi>10.1063/1.3099018</doi><url/><notes>This project developed a MEMS-based electro-osmotic pump originally for application in heat-transfer in semiconductor chips. An applied voltage pumped an ionic solution through a series of microfulidic channels resulting in a cooling effect on the semiconductor wafer and spreading heat from localised device hot-spots.The technology is now being developed for biochip applications, pumping tiny volumes of fluids to biochip sensors.It has lead to industrial interaction with etch tool manufacturer SPTS and a resulting 3-year &#xA3;176k project.This is a key eneabling technology for many of the nanohealth developments at Swansea.</notes><college>COLLEGE NANME</college><department>Chemistry</department><CollegeCode>COLLEGE CODE</CollegeCode><DepartmentCode>CHEM</DepartmentCode><institution>Swansea University</institution><apcterm/><lastEdited>2016-08-16T11:36:00.1821698</lastEdited><Created>2013-09-03T06:16:20.0000000</Created><path><level id="1">Faculty of Science and Engineering</level><level id="2">School of Engineering and Applied Sciences - Chemistry</level></path><authors><author><firstname>A</firstname><surname>P&#xE9;rez-Tom&#xE1;s</surname><order>1</order></author><author><firstname>M</firstname><surname>Lodzinski</surname><order>2</order></author><author><firstname>O. J</firstname><surname>Guy</surname><order>3</order></author><author><firstname>M. R</firstname><surname>Jennings</surname><order>4</order></author><author><firstname>M</firstname><surname>Placidi</surname><order>5</order></author><author><firstname>J</firstname><surname>Llobet</surname><order>6</order></author><author><firstname>P. M</firstname><surname>Gammon</surname><order>7</order></author><author><firstname>M. C</firstname><surname>Davis</surname><order>8</order></author><author><firstname>J. A</firstname><surname>Covington</surname><order>9</order></author><author><firstname>S. E</firstname><surname>Burrows</surname><order>10</order></author><author><firstname>P. A</firstname><surname>Mawby</surname><order>11</order></author><author><firstname>Owen</firstname><surname>Guy</surname><orcid>0000-0002-6449-4033</orcid><order>12</order></author></authors><documents/><OutputDurs/></rfc1807>
spelling 2016-08-16T11:36:00.1821698 v2 5657 2013-09-03 Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC c7fa5949b8528e048c5b978005f66794 0000-0002-6449-4033 Owen Guy Owen Guy true false 2013-09-03 CHEM Journal Article Applied Physics Letters 94 10 103510 0003-6951 31 12 2009 2009-12-31 10.1063/1.3099018 This project developed a MEMS-based electro-osmotic pump originally for application in heat-transfer in semiconductor chips. An applied voltage pumped an ionic solution through a series of microfulidic channels resulting in a cooling effect on the semiconductor wafer and spreading heat from localised device hot-spots.The technology is now being developed for biochip applications, pumping tiny volumes of fluids to biochip sensors.It has lead to industrial interaction with etch tool manufacturer SPTS and a resulting 3-year £176k project.This is a key eneabling technology for many of the nanohealth developments at Swansea. COLLEGE NANME Chemistry COLLEGE CODE CHEM Swansea University 2016-08-16T11:36:00.1821698 2013-09-03T06:16:20.0000000 Faculty of Science and Engineering School of Engineering and Applied Sciences - Chemistry A Pérez-Tomás 1 M Lodzinski 2 O. J Guy 3 M. R Jennings 4 M Placidi 5 J Llobet 6 P. M Gammon 7 M. C Davis 8 J. A Covington 9 S. E Burrows 10 P. A Mawby 11 Owen Guy 0000-0002-6449-4033 12
title Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
spellingShingle Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
Owen Guy
title_short Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
title_full Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
title_fullStr Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
title_full_unstemmed Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
title_sort Si/SiC bonded wafer: A route to carbon free SiO[sub 2] on SiC
author_id_str_mv c7fa5949b8528e048c5b978005f66794
author_id_fullname_str_mv c7fa5949b8528e048c5b978005f66794_***_Owen Guy
author Owen Guy
author2 A Pérez-Tomás
M Lodzinski
O. J Guy
M. R Jennings
M Placidi
J Llobet
P. M Gammon
M. C Davis
J. A Covington
S. E Burrows
P. A Mawby
Owen Guy
format Journal article
container_title Applied Physics Letters
container_volume 94
container_issue 10
container_start_page 103510
publishDate 2009
institution Swansea University
issn 0003-6951
doi_str_mv 10.1063/1.3099018
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Engineering and Applied Sciences - Chemistry{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Engineering and Applied Sciences - Chemistry
document_store_str 0
active_str 0
published_date 2009-12-31T03:06:51Z
_version_ 1763749722766442496
score 11.037581

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