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Electron Beam Lithography and Plasma Etching To Fabricate Supports for Studying Nanomaterials

Mona Alyobi, Richard Cobley Orcid Logo

International Journal of Research in Science, Volume: 3, Issue: 2, Start page: 18

Swansea University Author: Richard Cobley Orcid Logo

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DOI (Published version): 10.24178/ijrs.2017.3.2.18

Published in: International Journal of Research in Science
ISSN: 2412-4389
Published: Research Plus Journals 2017
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URI: https://cronfa.swan.ac.uk/Record/cronfa52760
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last_indexed 2023-03-18T04:05:51Z
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spelling 2023-03-17T15:14:36.3078559 v2 52760 2019-11-16 Electron Beam Lithography and Plasma Etching To Fabricate Supports for Studying Nanomaterials 2ce7e1dd9006164425415a35fa452494 0000-0003-4833-8492 Richard Cobley Richard Cobley true false 2019-11-16 ACEM Journal Article International Journal of Research in Science 3 2 18 Research Plus Journals 2412-4389 24 6 2017 2017-06-24 10.24178/ijrs.2017.3.2.18 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2023-03-17T15:14:36.3078559 2019-11-16T12:46:06.4501424 Professional Services Mona Alyobi 1 Richard Cobley 0000-0003-4833-8492 2 52760__18883__a539ba472df6453cabe734d53d111e9b.pdf 52760.pdf 2020-12-14T15:57:47.8597732 Output 132644 application/pdf Version of Record true This work is licensed under a Creative Commons Attribution-ShareAlike 4.0 International License. true eng https://creativecommons.org/licenses/by-sa/4.0/
title Electron Beam Lithography and Plasma Etching To Fabricate Supports for Studying Nanomaterials
spellingShingle Electron Beam Lithography and Plasma Etching To Fabricate Supports for Studying Nanomaterials
Richard Cobley
title_short Electron Beam Lithography and Plasma Etching To Fabricate Supports for Studying Nanomaterials
title_full Electron Beam Lithography and Plasma Etching To Fabricate Supports for Studying Nanomaterials
title_fullStr Electron Beam Lithography and Plasma Etching To Fabricate Supports for Studying Nanomaterials
title_full_unstemmed Electron Beam Lithography and Plasma Etching To Fabricate Supports for Studying Nanomaterials
title_sort Electron Beam Lithography and Plasma Etching To Fabricate Supports for Studying Nanomaterials
author_id_str_mv 2ce7e1dd9006164425415a35fa452494
author_id_fullname_str_mv 2ce7e1dd9006164425415a35fa452494_***_Richard Cobley
author Richard Cobley
author2 Mona Alyobi
Richard Cobley
format Journal article
container_title International Journal of Research in Science
container_volume 3
container_issue 2
container_start_page 18
publishDate 2017
institution Swansea University
issn 2412-4389
doi_str_mv 10.24178/ijrs.2017.3.2.18
publisher Research Plus Journals
college_str Professional Services
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hierarchy_top_id professionalservices
hierarchy_top_title Professional Services
hierarchy_parent_id professionalservices
hierarchy_parent_title Professional Services
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active_str 0
published_date 2017-06-24T13:57:15Z
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