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Electron Beam Lithography and Plasma Etching To Fabricate Supports for Studying Nanomaterials
Mona Alyobi,
Richard Cobley 
International Journal of Research in Science, Volume: 3, Issue: 2, Start page: 18
Swansea University Author:
Richard Cobley
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DOI (Published version): 10.24178/ijrs.2017.3.2.18
Abstract
Electron Beam Lithography and Plasma Etching To Fabricate Supports for Studying Nanomaterials
| Published in: | International Journal of Research in Science |
|---|---|
| ISSN: | 2412-4389 |
| Published: |
Research Plus Journals
2017
|
| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa52760 |
| College: |
Professional Services |
|---|---|
| Issue: |
2 |
| Start Page: |
18 |