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Nano-machining of films deposited on H-passivated Si(111)

P Miao, A W Robinson, R E Palmer, Richard Palmer Orcid Logo

Journal of Physics D: Applied Physics, Volume: 30, Issue: 24, Pages: 3307 - 3311

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1088/0022-3727/30/24/007

Published in: Journal of Physics D: Applied Physics
ISSN: 0022-3727 1361-6463
Published: 1997
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URI: https://cronfa.swan.ac.uk/Record/cronfa49511
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spelling 2019-03-18T14:38:50.8723494 v2 49511 2019-03-18 Nano-machining of films deposited on H-passivated Si(111) 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Journal Article Journal of Physics D: Applied Physics 30 24 3307 3311 0022-3727 1361-6463 31 12 1997 1997-12-31 10.1088/0022-3727/30/24/007 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:38:50.8723494 2019-03-18T14:38:50.6709230 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering P Miao 1 A W Robinson 2 R E Palmer 3 Richard Palmer 0000-0001-8728-8083 4
title Nano-machining of films deposited on H-passivated Si(111)
spellingShingle Nano-machining of films deposited on H-passivated Si(111)
Richard Palmer
title_short Nano-machining of films deposited on H-passivated Si(111)
title_full Nano-machining of films deposited on H-passivated Si(111)
title_fullStr Nano-machining of films deposited on H-passivated Si(111)
title_full_unstemmed Nano-machining of films deposited on H-passivated Si(111)
title_sort Nano-machining of films deposited on H-passivated Si(111)
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 P Miao
A W Robinson
R E Palmer
Richard Palmer
format Journal article
container_title Journal of Physics D: Applied Physics
container_volume 30
container_issue 24
container_start_page 3307
publishDate 1997
institution Swansea University
issn 0022-3727
1361-6463
doi_str_mv 10.1088/0022-3727/30/24/007
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 1997-12-31T04:33:50Z
_version_ 1851547430661652480
score 11.090071

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