Journal article 580 views
Nano-machining of films deposited on H-passivated Si(111)
Journal of Physics D: Applied Physics, Volume: 30, Issue: 24, Pages: 3307 - 3311
Swansea University Author: Richard Palmer
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DOI (Published version): 10.1088/0022-3727/30/24/007
Abstract
Nano-machining of films deposited on H-passivated Si(111)
Published in: | Journal of Physics D: Applied Physics |
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ISSN: | 0022-3727 1361-6463 |
Published: |
1997
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Online Access: |
Check full text
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URI: | https://cronfa.swan.ac.uk/Record/cronfa49511 |
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College: |
Faculty of Science and Engineering |
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Issue: |
24 |
Start Page: |
3307 |
End Page: |
3311 |