Journal article 861 views
Fabrication of silicon cones and pillars using rough metal films as plasma etching masks
K. Seeger,
R. E. Palmer,
Richard Palmer 
Applied Physics Letters, Volume: 74, Issue: 11, Pages: 1627 - 1629
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1063/1.123638
Abstract
Fabrication of silicon cones and pillars using rough metal films as plasma etching masks
| Published in: | Applied Physics Letters |
|---|---|
| ISSN: | 0003-6951 1077-3118 |
| Published: |
1999
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| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49471 |
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2019-03-18T20:01:59Z |
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2019-03-18T20:01:59Z |
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cronfa49471 |
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SURis |
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2019-03-18T14:37:12.1532710 v2 49471 2019-03-18 Fabrication of silicon cones and pillars using rough metal films as plasma etching masks 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Journal Article Applied Physics Letters 74 11 1627 1629 0003-6951 1077-3118 31 12 1999 1999-12-31 10.1063/1.123638 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:37:12.1532710 2019-03-18T14:37:11.9101589 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering K. Seeger 1 R. E. Palmer 2 Richard Palmer 0000-0001-8728-8083 3 |
| title |
Fabrication of silicon cones and pillars using rough metal films as plasma etching masks |
| spellingShingle |
Fabrication of silicon cones and pillars using rough metal films as plasma etching masks Richard Palmer |
| title_short |
Fabrication of silicon cones and pillars using rough metal films as plasma etching masks |
| title_full |
Fabrication of silicon cones and pillars using rough metal films as plasma etching masks |
| title_fullStr |
Fabrication of silicon cones and pillars using rough metal films as plasma etching masks |
| title_full_unstemmed |
Fabrication of silicon cones and pillars using rough metal films as plasma etching masks |
| title_sort |
Fabrication of silicon cones and pillars using rough metal films as plasma etching masks |
| author_id_str_mv |
6ae369618efc7424d9774377536ea519 |
| author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
| author |
Richard Palmer |
| author2 |
K. Seeger R. E. Palmer Richard Palmer |
| format |
Journal article |
| container_title |
Applied Physics Letters |
| container_volume |
74 |
| container_issue |
11 |
| container_start_page |
1627 |
| publishDate |
1999 |
| institution |
Swansea University |
| issn |
0003-6951 1077-3118 |
| doi_str_mv |
10.1063/1.123638 |
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Faculty of Science and Engineering |
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|
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
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0 |
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| published_date |
1999-12-31T05:57:12Z |
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1851280885367701504 |
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11.090362 |