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10 nm scale electron beam lithography using a triphenylene derivative as a negative/positive tone resist

Richard Palmer Orcid Logo

Swansea University Author: Richard Palmer Orcid Logo

Published: 1999
URI: https://cronfa.swan.ac.uk/Record/cronfa49463
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last_indexed 2019-03-18T20:01:58Z
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spelling 2019-03-18T14:36:57.8614721 v2 49463 2019-03-18 10 nm scale electron beam lithography using a triphenylene derivative as a negative/positive tone resist 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 MECH Journal Article 31 12 1999 1999-12-31 COLLEGE NANME Mechanical Engineering COLLEGE CODE MECH Swansea University 2019-03-18T14:36:57.8614721 2019-03-18T14:36:57.8614721 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering Richard Palmer 0000-0001-8728-8083 1
title 10 nm scale electron beam lithography using a triphenylene derivative as a negative/positive tone resist
spellingShingle 10 nm scale electron beam lithography using a triphenylene derivative as a negative/positive tone resist
Richard Palmer
title_short 10 nm scale electron beam lithography using a triphenylene derivative as a negative/positive tone resist
title_full 10 nm scale electron beam lithography using a triphenylene derivative as a negative/positive tone resist
title_fullStr 10 nm scale electron beam lithography using a triphenylene derivative as a negative/positive tone resist
title_full_unstemmed 10 nm scale electron beam lithography using a triphenylene derivative as a negative/positive tone resist
title_sort 10 nm scale electron beam lithography using a triphenylene derivative as a negative/positive tone resist
author_id_str_mv 6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Richard Palmer
author2 Richard Palmer
format Journal article
publishDate 1999
institution Swansea University
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering
document_store_str 0
active_str 0
published_date 1999-12-31T04:00:30Z
_version_ 1763753098250027008
score 11.013371

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