Journal article 605 views
Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
A. Wellner,
P.R. Preece,
J.C. Fowler,
R.E. Palmer,
Richard Palmer 
Microelectronic Engineering, Volume: 57-58, Pages: 919 - 924
Swansea University Author:
Richard Palmer
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1016/s0167-9317(01)00457-9
Abstract
Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers
| Published in: | Microelectronic Engineering |
|---|---|
| ISSN: | 01679317 |
| Published: |
2001
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| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa49427 |
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2019-03-18T20:01:53Z |
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2019-03-18T20:01:53Z |
| id |
cronfa49427 |
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SURis |
| fullrecord |
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2019-03-18T14:35:35.1682277 v2 49427 2019-03-18 Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-03-18 ACEM Journal Article Microelectronic Engineering 57-58 919 924 01679317 31 12 2001 2001-12-31 10.1016/s0167-9317(01)00457-9 COLLEGE NANME Aerospace, Civil, Electrical, and Mechanical Engineering COLLEGE CODE ACEM Swansea University 2019-03-18T14:35:35.1682277 2019-03-18T14:35:34.9539605 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering A. Wellner 1 P.R. Preece 2 J.C. Fowler 3 R.E. Palmer 4 Richard Palmer 0000-0001-8728-8083 5 |
| title |
Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers |
| spellingShingle |
Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers Richard Palmer |
| title_short |
Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers |
| title_full |
Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers |
| title_fullStr |
Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers |
| title_full_unstemmed |
Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers |
| title_sort |
Fabrication of ordered arrays of silicon nanopillars in silicon-on-insulator wafers |
| author_id_str_mv |
6ae369618efc7424d9774377536ea519 |
| author_id_fullname_str_mv |
6ae369618efc7424d9774377536ea519_***_Richard Palmer |
| author |
Richard Palmer |
| author2 |
A. Wellner P.R. Preece J.C. Fowler R.E. Palmer Richard Palmer |
| format |
Journal article |
| container_title |
Microelectronic Engineering |
| container_volume |
57-58 |
| container_start_page |
919 |
| publishDate |
2001 |
| institution |
Swansea University |
| issn |
01679317 |
| doi_str_mv |
10.1016/s0167-9317(01)00457-9 |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
| department_str |
School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Mechanical Engineering |
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0 |
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0 |
| published_date |
2001-12-31T07:42:31Z |
| _version_ |
1821390511835971584 |
| score |
11.048042 |