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Microfabrication of silicon tip structures for multiple-probe scanning tunneling microscopy

M. Bale, R. E. Palmer, Richard Palmer Orcid Logo

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, Volume: 20, Issue: 1, Start page: 364

Swansea University Author: Richard Palmer Orcid Logo

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DOI (Published version): 10.1116/1.1447242

Published in: Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
ISSN: 0734211X
Published: 2002
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URI: https://cronfa.swan.ac.uk/Record/cronfa49417
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College: Faculty of Science and Engineering
Issue: 1
Start Page: 364