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Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters

Hadi Madinei Orcid Logo, Hamed Haddad Khodaparast Orcid Logo, Michael Friswell, Sondipon Adhikari

Energy, Volume: 149, Pages: 990 - 999

Swansea University Authors: Hadi Madinei Orcid Logo, Hamed Haddad Khodaparast Orcid Logo, Michael Friswell, Sondipon Adhikari

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DOI (Published version): 10.1016/j.energy.2018.02.048

Abstract

This paper proposes the use of an electrostatic device to improve the performance of MEMS piezoelectric harvesters in the presence of manufacturing uncertainties. Different types of uncertain parameters have been considered and randomised according to their experimentally measured statistical proper...

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Published in: Energy
ISSN: 0360-5442
Published: 2018
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URI: https://cronfa.swan.ac.uk/Record/cronfa38740
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spelling 2020-10-06T13:46:48.0772057 v2 38740 2018-02-15 Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters d9a10856ae9e6a71793eab2365cff8b6 0000-0002-3401-1467 Hadi Madinei Hadi Madinei true false f207b17edda9c4c3ea074cbb7555efc1 0000-0002-3721-4980 Hamed Haddad Khodaparast Hamed Haddad Khodaparast true false 5894777b8f9c6e64bde3568d68078d40 Michael Friswell Michael Friswell true false 4ea84d67c4e414f5ccbd7593a40f04d3 Sondipon Adhikari Sondipon Adhikari true false 2018-02-15 AERO This paper proposes the use of an electrostatic device to improve the performance of MEMS piezoelectric harvesters in the presence of manufacturing uncertainties. Different types of uncertain parameters have been considered and randomised according to their experimentally measured statistical properties. It has been demonstrated that manufacturing uncertainty in MEMS harvesters results in a lower output power. Monte Carlo Simulation is used to propagate uncertainty through the MEMS mathematical model. It has been found that the uncertainty effects can result in two sets of samples. The first set of samples are those with resonance frequency higher than nominal values and the second set includes samples with resonance frequencies lower than the nominal value. The device proposed in this paper can compensate for the effects of variability in the harvester by tuning the resonance frequency to the nominal design. This device is composed of a symmetrical arrangement of two electrodes, which decrease the resonance frequency from its nominal value. However, achieving precise symmetrical conditions in the device on a micro-scale is not feasible. Therefore, the effects of an unsymmetrical arrangement due to manufacturing variability are also investigated. The device includes two arch-shaped electrodes that can be used to increase the resonance frequency. Journal Article Energy 149 990 999 0360-5442 Uncertainty; MEMS; Energy harvester; Piezoelectric; Nonlinear dynamics 15 4 2018 2018-04-15 10.1016/j.energy.2018.02.048 COLLEGE NANME Aerospace Engineering COLLEGE CODE AERO Swansea University 2020-10-06T13:46:48.0772057 2018-02-15T14:29:53.5346863 Faculty of Science and Engineering School of Engineering and Applied Sciences - Uncategorised Hadi Madinei 0000-0002-3401-1467 1 Hamed Haddad Khodaparast 0000-0002-3721-4980 2 Michael Friswell 3 Sondipon Adhikari 4 0038740-15022018143149.pdf madinei2018.pdf 2018-02-15T14:31:49.7730000 Output 1393105 application/pdf Accepted Manuscript true 2019-02-14T00:00:00.0000000 true eng
title Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters
spellingShingle Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters
Hadi Madinei
Hamed Haddad Khodaparast
Michael Friswell
Sondipon Adhikari
title_short Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters
title_full Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters
title_fullStr Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters
title_full_unstemmed Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters
title_sort Minimising the effects of manufacturing uncertainties in MEMS Energy harvesters
author_id_str_mv d9a10856ae9e6a71793eab2365cff8b6
f207b17edda9c4c3ea074cbb7555efc1
5894777b8f9c6e64bde3568d68078d40
4ea84d67c4e414f5ccbd7593a40f04d3
author_id_fullname_str_mv d9a10856ae9e6a71793eab2365cff8b6_***_Hadi Madinei
f207b17edda9c4c3ea074cbb7555efc1_***_Hamed Haddad Khodaparast
5894777b8f9c6e64bde3568d68078d40_***_Michael Friswell
4ea84d67c4e414f5ccbd7593a40f04d3_***_Sondipon Adhikari
author Hadi Madinei
Hamed Haddad Khodaparast
Michael Friswell
Sondipon Adhikari
author2 Hadi Madinei
Hamed Haddad Khodaparast
Michael Friswell
Sondipon Adhikari
format Journal article
container_title Energy
container_volume 149
container_start_page 990
publishDate 2018
institution Swansea University
issn 0360-5442
doi_str_mv 10.1016/j.energy.2018.02.048
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Engineering and Applied Sciences - Uncategorised{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Engineering and Applied Sciences - Uncategorised
document_store_str 1
active_str 0
description This paper proposes the use of an electrostatic device to improve the performance of MEMS piezoelectric harvesters in the presence of manufacturing uncertainties. Different types of uncertain parameters have been considered and randomised according to their experimentally measured statistical properties. It has been demonstrated that manufacturing uncertainty in MEMS harvesters results in a lower output power. Monte Carlo Simulation is used to propagate uncertainty through the MEMS mathematical model. It has been found that the uncertainty effects can result in two sets of samples. The first set of samples are those with resonance frequency higher than nominal values and the second set includes samples with resonance frequencies lower than the nominal value. The device proposed in this paper can compensate for the effects of variability in the harvester by tuning the resonance frequency to the nominal design. This device is composed of a symmetrical arrangement of two electrodes, which decrease the resonance frequency from its nominal value. However, achieving precise symmetrical conditions in the device on a micro-scale is not feasible. Therefore, the effects of an unsymmetrical arrangement due to manufacturing variability are also investigated. The device includes two arch-shaped electrodes that can be used to increase the resonance frequency.
published_date 2018-04-15T03:49:07Z
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score 11.013731

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