Conference Paper/Proceeding/Abstract 807 views
On intermittent-contact mode sensing using electrostatically-actuated micro-cantilevers with integrated thermal sensors
D.R. Sahoo,
W. Häberle,
P. Bächtold,
A. Sebastian,
H. Pozidis,
E. Eleftheriou,
Deepak Sahoo 
Proceedings of the American Control Conference
Swansea University Author:
Deepak Sahoo
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DOI (Published version): 10.1109/ACC.2008.4586792
Abstract
On intermittent-contact mode sensing using electrostatically-actuated micro-cantilevers with integrated thermal sensors
| Published in: | Proceedings of the American Control Conference |
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| Published: |
2008
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| Online Access: |
http://www.scopus.com/inward/record.url?eid=2-s2.0-52449087525&partnerID=MN8TOARS |
| URI: | https://cronfa.swan.ac.uk/Record/cronfa32166 |
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| College: |
Faculty of Science and Engineering |
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