Journal article 856 views
Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation
P. Agarwal,
D.R. Sahoo,
A. Sebastian,
H. Pozidis,
M.V. Salapaka,
Deepak Sahoo 
Journal of Microelectromechanical Systems, Volume: 19, Issue: 1, Pages: 83 - 98
Swansea University Author:
Deepak Sahoo
Full text not available from this repository: check for access using links below.
DOI (Published version): 10.1109/JMEMS.2009.2037340
Abstract
Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation
| Published in: | Journal of Microelectromechanical Systems |
|---|---|
| ISSN: | 1057-7157 1941-0158 |
| Published: |
2010
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| Online Access: |
Check full text
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa32161 |
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| College: |
Faculty of Science and Engineering |
|---|---|
| Issue: |
1 |
| Start Page: |
83 |
| End Page: |
98 |