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Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation

P. Agarwal, D.R. Sahoo, A. Sebastian, H. Pozidis, M.V. Salapaka, Deepak Sahoo Orcid Logo

Journal of Microelectromechanical Systems, Volume: 19, Issue: 1, Pages: 83 - 98

Swansea University Author: Deepak Sahoo Orcid Logo

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DOI (Published version): 10.1109/JMEMS.2009.2037340

Published in: Journal of Microelectromechanical Systems
ISSN: 1057-7157 1941-0158
Published: 2010
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URI: https://cronfa.swan.ac.uk/Record/cronfa32161
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first_indexed 2017-02-28T13:32:23Z
last_indexed 2018-02-09T05:19:47Z
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spelling 2017-02-28T09:35:17.1328506 v2 32161 2017-02-28 Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation c7b57876957049ac9718ff1b265fb2ce 0000-0002-4421-7549 Deepak Sahoo Deepak Sahoo true false 2017-02-28 SCS Journal Article Journal of Microelectromechanical Systems 19 1 83 98 1057-7157 1941-0158 31 12 2010 2010-12-31 10.1109/JMEMS.2009.2037340 http://www.scopus.com/inward/record.url?eid=2-s2.0-76349087826&amp;partnerID=MN8TOARS COLLEGE NANME Computer Science COLLEGE CODE SCS Swansea University 2017-02-28T09:35:17.1328506 2017-02-28T09:35:16.8052443 Faculty of Science and Engineering School of Mathematics and Computer Science - Computer Science P. Agarwal 1 D.R. Sahoo 2 A. Sebastian 3 H. Pozidis 4 M.V. Salapaka 5 Deepak Sahoo 0000-0002-4421-7549 6
title Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation
spellingShingle Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation
Deepak Sahoo
title_short Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation
title_full Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation
title_fullStr Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation
title_full_unstemmed Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation
title_sort Real-Time Models of Electrostatically Actuated Cantilever Probes With Integrated Thermal Sensor for Nanoscale Interrogation
author_id_str_mv c7b57876957049ac9718ff1b265fb2ce
author_id_fullname_str_mv c7b57876957049ac9718ff1b265fb2ce_***_Deepak Sahoo
author Deepak Sahoo
author2 P. Agarwal
D.R. Sahoo
A. Sebastian
H. Pozidis
M.V. Salapaka
Deepak Sahoo
format Journal article
container_title Journal of Microelectromechanical Systems
container_volume 19
container_issue 1
container_start_page 83
publishDate 2010
institution Swansea University
issn 1057-7157
1941-0158
doi_str_mv 10.1109/JMEMS.2009.2037340
college_str Faculty of Science and Engineering
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hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
department_str School of Mathematics and Computer Science - Computer Science{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Mathematics and Computer Science - Computer Science
url http://www.scopus.com/inward/record.url?eid=2-s2.0-76349087826&amp;partnerID=MN8TOARS
document_store_str 0
active_str 0
published_date 2010-12-31T03:39:22Z
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score 11.036684

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