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Simulation of Mass Sensor Based on Luminescence of Micro/Nano Electromechanical Resonator
Lijie Li 
IEEE Electron Device Letters, Pages: 1 - 1
Swansea University Author:
Lijie Li
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DOI (Published version): 10.1109/LED.2017.2661261
Abstract
We report a novel mass sensor based on detecting the luminescence from micro/nano electromechanical resonators. Multi-physics simulation has been conducted to elucidate this concept. It is found that the added mass affects both the resonant frequency and oscillating amplitude of the mechanical reson...
| Published in: | IEEE Electron Device Letters |
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| ISSN: | 0741-3106 1558-0563 |
| Published: |
2017
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| Online Access: |
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| URI: | https://cronfa.swan.ac.uk/Record/cronfa31838 |
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| Abstract: |
We report a novel mass sensor based on detecting the luminescence from micro/nano electromechanical resonators. Multi-physics simulation has been conducted to elucidate this concept. It is found that the added mass affects both the resonant frequency and oscillating amplitude of the mechanical resonator. However we mainly use the change of oscillating amplitude to detect the added mass by observing varied optical intensity. For the device simulated, the sensitivity ((f=f0)=m per microgram) is 2% g1 if using frequency measurement through electronic circuits, while the sensitivity ((IL=I0)=m per microgram) is 377% g1 using amplitude measurement through the proposed optical method. |
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| Keywords: |
Piezoelectric, Mass sensor, Luminescence |
| College: |
Faculty of Science and Engineering |
| Start Page: |
1 |
| End Page: |
1 |