Conference Paper/Proceeding/Abstract 1254 views
Vibration suppression in MEMS devices using electrostatic forces
SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring, Volume: 9799, Start page: 979917
Swansea University Author: Hamed Haddad Khodaparast
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DOI (Published version): 10.1117/12.2222069
Abstract
Vibration suppression in MEMS devices using electrostatic forces
Published in: | SPIE Smart Structures and Materials + Nondestructive Evaluation and Health Monitoring |
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Published: |
2016
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URI: | https://cronfa.swan.ac.uk/Record/cronfa27196 |
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College: |
Faculty of Science and Engineering |
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Start Page: |
979917 |