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MEMS Gas Flow Sensor Based on Thermally Induced Cantilever Resonance Frequency Shift

Robert Blue, James G. Brown, Lijie Li Orcid Logo, Ralf Bauer, Deepak Uttamchandani

IEEE Sensors Journal, Volume: 20, Issue: 8, Pages: 4139 - 4146

Swansea University Author: Lijie Li Orcid Logo

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DOI (Published version): 10.1109/jsen.2020.2964323

Abstract

This paper reports a novel MEMS gas flow sensor that relies on the temperature drop induced when the gas flows over an electrically heated MEMS triple-beam resonator. Modelling, simulation and characterization of the sensor has been undertaken to quantify the temperature-induced shift of resonance f...

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Published in: IEEE Sensors Journal
ISSN: 1530-437X 2379-9153
Published: Institute of Electrical and Electronics Engineers (IEEE) 2020
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URI: https://cronfa.swan.ac.uk/Record/cronfa53154
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first_indexed 2020-01-09T05:05:51Z
last_indexed 2020-10-17T03:06:45Z
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spelling 2020-10-16T14:04:33.8779541 v2 53154 2020-01-08 MEMS Gas Flow Sensor Based on Thermally Induced Cantilever Resonance Frequency Shift ed2c658b77679a28e4c1dcf95af06bd6 0000-0003-4630-7692 Lijie Li Lijie Li true false 2020-01-08 EEEG This paper reports a novel MEMS gas flow sensor that relies on the temperature drop induced when the gas flows over an electrically heated MEMS triple-beam resonator. Modelling, simulation and characterization of the sensor has been undertaken to quantify the temperature-induced shift of resonance frequency of the resonator, which can be directly related to the rate of gas flow over the heated resonator. The MEMS resonator was actuated into mechanical resonance through application of an AC voltage to an aluminum nitride (AlN) piezoelectric layer coated on the central beam of the triple-beam resonator. A reversible change in resonance frequency was measured experimentally for nitrogen flow rates up to 5000 ml/min. At 5 V operating voltage the linear response fit measured from experiments yielded a 67 ml/min per Hz slope over a flow rate range from 0 ml/min to 4000 ml/min. Journal Article IEEE Sensors Journal 20 8 4139 4146 Institute of Electrical and Electronics Engineers (IEEE) 1530-437X 2379-9153 Anemometer , Cantilever , Electrothermal , Micromechanical systems (MEMS) , Piezoelectric , Resonance 15 4 2020 2020-04-15 10.1109/jsen.2020.2964323 COLLEGE NANME Electronic and Electrical Engineering COLLEGE CODE EEEG Swansea University 2020-10-16T14:04:33.8779541 2020-01-08T13:20:03.8461672 Professional Services ISS - Uncategorised Robert Blue 1 James G. Brown 2 Lijie Li 0000-0003-4630-7692 3 Ralf Bauer 4 Deepak Uttamchandani 5 53154__16436__2606c94724e64706a3576cc52d13ff6d.pdf 53154.pdf 2020-01-24T17:31:29.4958173 Output 1383407 application/pdf Accepted Manuscript true true eng
title MEMS Gas Flow Sensor Based on Thermally Induced Cantilever Resonance Frequency Shift
spellingShingle MEMS Gas Flow Sensor Based on Thermally Induced Cantilever Resonance Frequency Shift
Lijie Li
title_short MEMS Gas Flow Sensor Based on Thermally Induced Cantilever Resonance Frequency Shift
title_full MEMS Gas Flow Sensor Based on Thermally Induced Cantilever Resonance Frequency Shift
title_fullStr MEMS Gas Flow Sensor Based on Thermally Induced Cantilever Resonance Frequency Shift
title_full_unstemmed MEMS Gas Flow Sensor Based on Thermally Induced Cantilever Resonance Frequency Shift
title_sort MEMS Gas Flow Sensor Based on Thermally Induced Cantilever Resonance Frequency Shift
author_id_str_mv ed2c658b77679a28e4c1dcf95af06bd6
author_id_fullname_str_mv ed2c658b77679a28e4c1dcf95af06bd6_***_Lijie Li
author Lijie Li
author2 Robert Blue
James G. Brown
Lijie Li
Ralf Bauer
Deepak Uttamchandani
format Journal article
container_title IEEE Sensors Journal
container_volume 20
container_issue 8
container_start_page 4139
publishDate 2020
institution Swansea University
issn 1530-437X
2379-9153
doi_str_mv 10.1109/jsen.2020.2964323
publisher Institute of Electrical and Electronics Engineers (IEEE)
college_str Professional Services
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hierarchy_top_title Professional Services
hierarchy_parent_id professionalservices
hierarchy_parent_title Professional Services
department_str ISS - Uncategorised{{{_:::_}}}Professional Services{{{_:::_}}}ISS - Uncategorised
document_store_str 1
active_str 0
description This paper reports a novel MEMS gas flow sensor that relies on the temperature drop induced when the gas flows over an electrically heated MEMS triple-beam resonator. Modelling, simulation and characterization of the sensor has been undertaken to quantify the temperature-induced shift of resonance frequency of the resonator, which can be directly related to the rate of gas flow over the heated resonator. The MEMS resonator was actuated into mechanical resonance through application of an AC voltage to an aluminum nitride (AlN) piezoelectric layer coated on the central beam of the triple-beam resonator. A reversible change in resonance frequency was measured experimentally for nitrogen flow rates up to 5000 ml/min. At 5 V operating voltage the linear response fit measured from experiments yielded a 67 ml/min per Hz slope over a flow rate range from 0 ml/min to 4000 ml/min.
published_date 2020-04-15T04:06:00Z
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score 11.037581

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