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Combining scanning tunneling microscope (STM) imaging and local manipulation to probe the high dose oxidation structure of the Si(111)-7×7 surface
Nano Research, Volume: 13, Issue: 1, Pages: 145 - 150
Swansea University Authors: Richard Cobley , Richard Palmer
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DOI (Published version): 10.1007/s12274-019-2587-1
Abstract
Understanding the atomistic formation of oxide layers on semiconductors is important for thin film fabrication, scaling down conventional devices and for the integration of emerging research materials. Here, the initial oxidation of Si(111) is studied using the scanning tunneling microscope. Prior t...
Published in: | Nano Research |
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ISSN: | 1998-0124 1998-0000 |
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Springer Science and Business Media LLC
2020
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URI: | https://cronfa.swan.ac.uk/Record/cronfa53137 |
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2020-10-29T13:21:06.7053813 v2 53137 2020-01-07 Combining scanning tunneling microscope (STM) imaging and local manipulation to probe the high dose oxidation structure of the Si(111)-7×7 surface 2ce7e1dd9006164425415a35fa452494 0000-0003-4833-8492 Richard Cobley Richard Cobley true false 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2020-01-07 EEEG Understanding the atomistic formation of oxide layers on semiconductors is important for thin film fabrication, scaling down conventional devices and for the integration of emerging research materials. Here, the initial oxidation of Si(111) is studied using the scanning tunneling microscope. Prior to the complete saturation of the silicon surface with oxygen, we are able to probe the atomic nature of the oxide layer formation. We establish the threshold for local manipulation of inserted oxygen sites to be +3.8 V. Only by combining imaging with local atomic manipulation are we able to determine whether inserted oxygen exists beneath surface-bonded oxygen sites and differentiate between sites that have one and more than one oxygen atom inserted beneath the surface. Prior to the creation of the thin oxide film we observe a flip in the manipulation rates of inserted oxygen sites consistent with more oxygen inserting beneath the silicon surface. Journal Article Nano Research 13 1 145 150 Springer Science and Business Media LLC 1998-0124 1998-0000 scanning tunneling microscopy (STM), local manipulation, Si(111), oxidation 2 1 2020 2020-01-02 10.1007/s12274-019-2587-1 COLLEGE NANME Electronic and Electrical Engineering COLLEGE CODE EEEG Swansea University 2020-10-29T13:21:06.7053813 2020-01-07T14:53:50.9151266 Faculty of Science and Engineering School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering Dogan Kaya 1 Richard Cobley 0000-0003-4833-8492 2 Richard Palmer 0000-0001-8728-8083 3 53137__16222__70a1081dd2df425880326cc13a0063e6.pdf Kaya2020.pdf 2020-01-07T14:55:06.4877607 Output 1868364 application/pdf Version of Record true Released under the terms of a Creative Commons Attribution 4.0 International License (CC-BY). true eng http://creativecommons.org/licenses/by/4.0/ |
title |
Combining scanning tunneling microscope (STM) imaging and local manipulation to probe the high dose oxidation structure of the Si(111)-7×7 surface |
spellingShingle |
Combining scanning tunneling microscope (STM) imaging and local manipulation to probe the high dose oxidation structure of the Si(111)-7×7 surface Richard Cobley Richard Palmer |
title_short |
Combining scanning tunneling microscope (STM) imaging and local manipulation to probe the high dose oxidation structure of the Si(111)-7×7 surface |
title_full |
Combining scanning tunneling microscope (STM) imaging and local manipulation to probe the high dose oxidation structure of the Si(111)-7×7 surface |
title_fullStr |
Combining scanning tunneling microscope (STM) imaging and local manipulation to probe the high dose oxidation structure of the Si(111)-7×7 surface |
title_full_unstemmed |
Combining scanning tunneling microscope (STM) imaging and local manipulation to probe the high dose oxidation structure of the Si(111)-7×7 surface |
title_sort |
Combining scanning tunneling microscope (STM) imaging and local manipulation to probe the high dose oxidation structure of the Si(111)-7×7 surface |
author_id_str_mv |
2ce7e1dd9006164425415a35fa452494 6ae369618efc7424d9774377536ea519 |
author_id_fullname_str_mv |
2ce7e1dd9006164425415a35fa452494_***_Richard Cobley 6ae369618efc7424d9774377536ea519_***_Richard Palmer |
author |
Richard Cobley Richard Palmer |
author2 |
Dogan Kaya Richard Cobley Richard Palmer |
format |
Journal article |
container_title |
Nano Research |
container_volume |
13 |
container_issue |
1 |
container_start_page |
145 |
publishDate |
2020 |
institution |
Swansea University |
issn |
1998-0124 1998-0000 |
doi_str_mv |
10.1007/s12274-019-2587-1 |
publisher |
Springer Science and Business Media LLC |
college_str |
Faculty of Science and Engineering |
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facultyofscienceandengineering |
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Faculty of Science and Engineering |
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facultyofscienceandengineering |
hierarchy_parent_title |
Faculty of Science and Engineering |
department_str |
School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering{{{_:::_}}}Faculty of Science and Engineering{{{_:::_}}}School of Aerospace, Civil, Electrical, General and Mechanical Engineering - Electronic and Electrical Engineering |
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description |
Understanding the atomistic formation of oxide layers on semiconductors is important for thin film fabrication, scaling down conventional devices and for the integration of emerging research materials. Here, the initial oxidation of Si(111) is studied using the scanning tunneling microscope. Prior to the complete saturation of the silicon surface with oxygen, we are able to probe the atomic nature of the oxide layer formation. We establish the threshold for local manipulation of inserted oxygen sites to be +3.8 V. Only by combining imaging with local atomic manipulation are we able to determine whether inserted oxygen exists beneath surface-bonded oxygen sites and differentiate between sites that have one and more than one oxygen atom inserted beneath the surface. Prior to the creation of the thin oxide film we observe a flip in the manipulation rates of inserted oxygen sites consistent with more oxygen inserting beneath the silicon surface. |
published_date |
2020-01-02T04:05:58Z |
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1763753442614968320 |
score |
11.037603 |