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Angular dependence of nanoparticle generation in the matrix assembly cluster source

Maria Chiara Spadaro, Junlei Zhao, William D. Terry, Jian Liu, Feng Yin, Flyura Djurabekova, Richard Palmer Orcid Logo

Nano Research, Volume: 12, Issue: 12, Pages: 3069 - 3074

Swansea University Authors: Maria Chiara Spadaro, Richard Palmer Orcid Logo

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DOI (Published version): 10.1007/s12274-019-2553-y

Abstract

The matrix assembly cluster source (MACS) represents a bridge between conventional instruments for cluster beam deposition (CBD) and the level of industrial production. The method is based on Ar+ ion sputtering of a pre-condensed Ar-M matrix (where M, is typically a metal such as Ag). Each Ar+ ion p...

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Published in: Nano Research
ISSN: 1998-0124 1998-0000
Published: Springer Science and Business Media LLC 2019
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URI: https://cronfa.swan.ac.uk/Record/cronfa52867
first_indexed 2019-11-25T13:13:42Z
last_indexed 2023-03-18T04:06:01Z
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spelling 2023-03-17T11:17:41.9458793 v2 52867 2019-11-25 Angular dependence of nanoparticle generation in the matrix assembly cluster source 8733e40ba2bb203e97f99354be3348a5 Maria Chiara Spadaro Maria Chiara Spadaro true false 6ae369618efc7424d9774377536ea519 0000-0001-8728-8083 Richard Palmer Richard Palmer true false 2019-11-25 The matrix assembly cluster source (MACS) represents a bridge between conventional instruments for cluster beam deposition (CBD) and the level of industrial production. The method is based on Ar+ ion sputtering of a pre-condensed Ar-M matrix (where M, is typically a metal such as Ag). Each Ar+ ion produces a collision cascade and thus the formation of metal clusters is in the matrix, which are then sputtered out. Here we present an experimental and computational investigation of the cluster emission process, specifically its dependence on the Ar+ ion angle of incidence and the cluster emission angle. We find the incidence angle strongly influences the emerging cluster flux, which is assigned to the spatial location of the deposited primary ion energy relative to the cluster into the matrix. We also found an approximately constant angle between the incident ion beam and the peak in the emitted cluster distribution, with value between 99° and 109°. Journal Article Nano Research 12 12 3069 3074 Springer Science and Business Media LLC 1998-0124 1998-0000 1 12 2019 2019-12-01 10.1007/s12274-019-2553-y http://dx.doi.org/10.1007/s12274-019-2553-y COLLEGE NANME COLLEGE CODE Swansea University 2023-03-17T11:17:41.9458793 2019-11-25T11:58:31.2891743 Faculty of Science and Engineering Maria Chiara Spadaro 1 Junlei Zhao 2 William D. Terry 3 Jian Liu 4 Feng Yin 5 Flyura Djurabekova 6 Richard Palmer 0000-0001-8728-8083 7 52867__15953__0f36cbad907048d2830b8d1e7ad05525.pdf spadaro2019.pdf 2019-11-25T12:00:11.1140147 Output 2903500 application/pdf Version of Record true 2019-11-25T00:00:00.0000000 false This article is licensed under a Creative Commons Attribution 4.0 International License, which permits use, sharing, adaptation, distribution and reproduction in any medium or format, as long as you give appropriate credit to the original author(s) and the source, provide a link to the Creative Commons licence, and indicate if changes were made. The images or other third party material in this article are included in the article’s Creative Commons licence, unless indicated otherwise in a credit line to the material. If material is not included in the article’s Creative Commons licence and your intended use is not permitted by statutory regulation or exceeds the permitted use, you will need to obtain permission directly from the copyright holder. To view a copy of this licence, visit http://creativecommons.org/licenses/by/4.0/.
title Angular dependence of nanoparticle generation in the matrix assembly cluster source
spellingShingle Angular dependence of nanoparticle generation in the matrix assembly cluster source
Maria Chiara Spadaro
Richard Palmer
title_short Angular dependence of nanoparticle generation in the matrix assembly cluster source
title_full Angular dependence of nanoparticle generation in the matrix assembly cluster source
title_fullStr Angular dependence of nanoparticle generation in the matrix assembly cluster source
title_full_unstemmed Angular dependence of nanoparticle generation in the matrix assembly cluster source
title_sort Angular dependence of nanoparticle generation in the matrix assembly cluster source
author_id_str_mv 8733e40ba2bb203e97f99354be3348a5
6ae369618efc7424d9774377536ea519
author_id_fullname_str_mv 8733e40ba2bb203e97f99354be3348a5_***_Maria Chiara Spadaro
6ae369618efc7424d9774377536ea519_***_Richard Palmer
author Maria Chiara Spadaro
Richard Palmer
author2 Maria Chiara Spadaro
Junlei Zhao
William D. Terry
Jian Liu
Feng Yin
Flyura Djurabekova
Richard Palmer
format Journal article
container_title Nano Research
container_volume 12
container_issue 12
container_start_page 3069
publishDate 2019
institution Swansea University
issn 1998-0124
1998-0000
doi_str_mv 10.1007/s12274-019-2553-y
publisher Springer Science and Business Media LLC
college_str Faculty of Science and Engineering
hierarchytype
hierarchy_top_id facultyofscienceandengineering
hierarchy_top_title Faculty of Science and Engineering
hierarchy_parent_id facultyofscienceandengineering
hierarchy_parent_title Faculty of Science and Engineering
url http://dx.doi.org/10.1007/s12274-019-2553-y
document_store_str 1
active_str 0
description The matrix assembly cluster source (MACS) represents a bridge between conventional instruments for cluster beam deposition (CBD) and the level of industrial production. The method is based on Ar+ ion sputtering of a pre-condensed Ar-M matrix (where M, is typically a metal such as Ag). Each Ar+ ion produces a collision cascade and thus the formation of metal clusters is in the matrix, which are then sputtered out. Here we present an experimental and computational investigation of the cluster emission process, specifically its dependence on the Ar+ ion angle of incidence and the cluster emission angle. We find the incidence angle strongly influences the emerging cluster flux, which is assigned to the spatial location of the deposited primary ion energy relative to the cluster into the matrix. We also found an approximately constant angle between the incident ion beam and the peak in the emitted cluster distribution, with value between 99° and 109°.
published_date 2019-12-01T07:50:44Z
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score 11.364387

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